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Veeco Gen-930 MBE Reactor
Veeco Gen-930 MBE Reactor
The III-V molecular beam epitaxy reactor was installed at KIST in 2008. This machine currently has group-III cells of Al, Ga, In, and a group-V cells of arsenic (As), antimony (Sb), phosphorus (P) with dopant cells of Be for p-type and Si, Te for n-type.
DIC Optical Microscope
DIC Optical Microscope
NIKON LV150NA
Optical microscope with differential interference contrast (DIC) filter. Magnification up to x1000.
Solar simulator
Solar simulator
Custom-built solar simulator for solar cell measurement.
Atomic Force Microscope (shared)
Atomic Force Microscope (shared)
Park systems XE-15
Scanning in tapping mode, contact mode
Laser Diode Light-current-voltage measurement
Laser Diode Light-current-voltage measurement
Laser diode (LD), Light-emitting diode (LED) LIV, spectrum measurement with temperature-controlled stage.
Visible wavelength (400nm-1000nm), NIR (1000nm-1650 nm), SWIR (1500nm-2450nm)
Photoluminescence (PL)
Photoluminescence (PL)
PL system with He cooled cryogenic stage
SEM
SEM
KIST Advanced Analysis Center
TEM
TEM
KIST Advanced Analysis Center
HRXRD
HRXRD
ATG Rigaku high-resolution XRD machine (45 keV, 250 mA).
operated by KIST Advanced Analysis Center
FIB
FIB
KIST Advanced Analysis Center
KIST L1 Cleanroom
KIST L1 Cleanroom
The cleanroom at KIST L1 is equipped with various standard photolithography machines such as spin coater, mask aligner, e-beam deposition, fume hood, and CVD.
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