MEMS/NEMS Resonators & Sensors

MEMS/NEMS resonators are key components that play vital roles in both RF communication and sensing applications.They enable precise detection of physical and chemical stimuli through subtle variations in their resonant frequency. With their high sensitivity, frequency stability, low power consumption, compact and wireless-compatible structure, and excellent CMOS process compatibility for circuit-level integration, they are recognized as a core technology for next-generation high-performance smart sensors.

Outline:

The NanoMAD focuses on the design and realization of MEMS/NEMS piezoelectric resonators operating in the MHz–GHz frequency range, as well as their applications to ultra-miniaturized and high-sensitivity sensors. Our group holds comprehensive expertise across the entire development process, including resonator design, semiconductor-based microfabrication, sensing material integration, signal measurement and processing, and device characterization, and extends its research to diverse application areas such as semiconductor, environmental, and bio-sensing technologies.

Our main research areas include:

1. Simulation-based analysis and design of piezoelectric resonators & sensors.

2. Process design and development of MEMS/NEMS devices using advanced semiconductor microfabrication technologies.

3. Development and characterization of functional materials for environmental and chemical sensing.

4. Sensor applications across semiconductor, environmental, and biomedical fields.