Research

Nanomaterials and many functional materials have drawn much attention thanks to their outstanding properties. However, the current semiconductor and MEMS/NEMS technologies still heavily rely on silicon and other conventional CMOS materials. There is much need to come up with economical yet scalable manufacturing methods for the successful integration of nano- and functional materials.

With this mission in mind, NanoMAD Lab is developing advanced manufacturing processes to build future micro and nano Systems. Key thrust areas are:

1. MEMS/NEMS : RF, Sensors, micro/nano heaters, assembly

2. Nanomaterials : Synthesis, device integration, property measurements

3. Flexible Devices : heaters, temperature/pressure sensors, transfer printing