Ph.D Course Students
Master / BS&MS combined Course Students
Research Interest
: Plasma etch process
: Plasma chemical reactions
Research Interest
: Plasma fluid simulation
: Capacitively coupled plasma
Research Interest
: Pulsed plasma etch
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Research Interest
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Undergraduate Students
Research Interest
: Plasma etch process
Research Interest
: Plasma enhanced ALD
: TSV process
Research Interest
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Research Interest
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