Ph.D Course Students
Master / BS&MS combined Course Students
Research Interest
: Plasma etch process
: Etch feature profile simulation
Research Interest
: Plasma fluid simulation
: Etch feature profile simulation
Research Interest
: Pulsed plasma etch
: Plasma simulation
Research Interest
: Advanced TSV process
: Sputtering process
Research Interest
: Pulsed CCP-RIE
: VI-probe diagnostics
Research Interest
: PEALD process
: PEALD & RIE Hybrid source
Undergraduate Students
Research Interest
: MPCVD
: Diamond heteroepitaxy