Embedded Files
Multi-target magnetron sputter
Multi-target magnetron sputter
Pulsed DC plasma sputtering
RF sputtering
Magnetron Sputter
application : Al, Ti, TiN, ITO , etc
Plasma Enhance ALD
Plasma Enhance ALD
CCP type plasma source
narrow gap discharge
shower head type source
application : Al2O3, HfO2, C(amorphous carbon), etc
Reactive Ion Etcher
Reactive Ion Etcher
CCP type plasma source
Dielectric Etch
application : Si, SiO2, etc
Comsol Multiphysics Tool
Comsol Multiphysics Tool
Plasma fluid simulation
EM simulation, Heat transfer simulation, etc
K-speed
K-speed
3D Etch feature profile simulation for plasma processing
Mini OES
Mini OES
Optical Emission Spectroscopy, SR4
VI Probe(Octive Mono)
VI Probe(Octive Mono)
RF Power meter, directional power sensor and impedance anlayser
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