１．原著論文

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(* Corresponding author)

[1] “Electrical modification of a conductive polymer using a scanning probe microscope.” Nanotechnology, 14, (2003), 1051-1054

    Takahito Ono*, Shinya Yoshida, Masayoshi Esashi

[2] “Reversible electrical medication on conductive polymer for proximity probe data storage.” Nanotechnology, 16, (2005), 2516-2520

    Shinya Yoshida*, Takahito Ono, Shuichi Oi, Masayoshi Esashi

[3] “Optical amplification of the resonance of a bimetal silicon cantilever.” Applied Physics Letters, 90, (2007), 243112-243114

    Takahito Ono*, Shinya Yoshida, Yusuke Kawai, Masayoshi Esashi

[4] “Conductive polymer patterned media for scanning multiprobe data storage.” Nanotechnology, 18, (2007), 505302-505306

    Shinya Yoshida*, Takahito Ono, Masayoshi Esashi,

[5] “Formation of a Flat Conductive Polymer Film Using Template-Stripped Gold (TSG) Surface and Surface-Graft Polymerization for Scanning Multiprobe Data Storage.” e-Journal of Surface Science and Nanotechnology, 6, (2008), 202-208,

    Shinya Yoshida*, Takahito Ono, Masayoshi Esashi

[6] “Conductive polymer patterned media fabricated by diblock copolymer lithography for scanning multiprobe data storage.” Nanotechnology, 19(47), (2008), 475302-475400

    Shinya Yoshida*, Takahito Ono and Masayoshi Esashi

[7] “Deposition of conductivity-switching polyimide film by molecular layer deposition and electrical modification using scanning probe microscope.” Micro&Nano Letters, 5(5), (2010), 321-323

    Shinya Yoshida*, Takahito Ono, Masayoshi Esashi

[8] “Etching Technology Using Ozone for Chemically Stable Polymer in MEMS.” IEEJ Transactions on Sensors and Micromachines, 131(3), (2011), 122-127

    Hideaki Yanagida*, Shinya Yoshida, Masayoshi Esashi, Shuji Tanaka

[9] “Local electrical modification of a conductivity-switching polyimide film formed by molecular layer deposition”, Nanotechnology, 22, (2011), 335302

    Shinya Yoshida*, Takahito Ono and Masayoshi Esashi

[10] “Redox active polymers with phenothiazine moieties for nanoscale patterning via conductive Scanning Force Microscopy”, Nanoscale, 3(12), 2011, 5049-5058

    Ali Golriz, Tassilo Kaule, Jeannine Heller, Maria B. Untch, Philipp Schattling, Patrick Theato, Masaya Toda, Shinya Yoshida, Takahito Ono, Hans-Jürgen     Butt, Jochen Stefan Gutmann* and Rüdiger Berger*

[11] “Conformal coating of poly-glycidyl methacrylate as lithographic polymer via initiated chemical vapor deposition”, Journal of Micro-Nanolithography, MEMS and MOEMS, 11(2), (2012), 023001

    Shinya Yoshida*, Tatsuya Kobayashi, Masafumi Kumano, Masayoshi Esashi,

[12] “LSI-based amperometric sensor for bio-imaging and multi-point biosensing”, Lab on a Chip, 12, (2012) 3481-3490

    Kumi Y. Inoue*, Masahki Matsudaira, Reyushi Kubo, Masanori Nakano, Shinya Yoshida, Sakae Matsuzaki, Atsushi Suda, Ryota Kunikata, Tatsuo Kimura, Ryota Tsurumi, Toshihito Shioya, Kosuke Ino, Hitoshi Shiku, Shiro Satoh, Masayoshi Esashi and Tomokazu Matsue*,

[13] “Simple Removal Technology of Chemically-Stable Polymer in MEMS Using Ozone Solution”, Journal of Microelectromechanical Systems, 22, (2013) 87-93

    Shinya Yoshida*, Hideaki Yanagida, Masayoshi Esashi and Shuji Tanaka

[14] “Investigation of Mechanical and Tribological Properties of Polyaniline Brush by Atomic Force Microscopy for Scanning Probe-Based Data Storage” e-Journal of Surface Science and Nanotechnology, 11, (2013) 53-59

    Shinya Yoshida*, So Fujinami and Masayoshi Esashi

[15] “Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT structure”, Journal of Micromechanics and Microengineering, 23, (2013) 065014

    Shinya Yoshida*, Nan Wang, Masafumi Kumano, Yusuke Kawai, Shuji Tanaka and Masayoshi Esashi

[16] “Annealing Transformation of Diamond-Like Carbon Using Ni Catalyst.”, Japanese Journal of Applied Physics, 52: (2013) 128005.

    Junji Sone*, Naoto Shigeta, Katsumi Yamada, Takayuki Uchida, Shinya Yoshida, Takeshi Hayasaka and Shuji Tanaka.

[17] “Measurement of Muonium Emission from Silica Aerogel.” Progress of Theoretical and Experimental Physics, 10, (2013) 103C01–103C01.

    P. Bakule, G. A. Beer, D. Contreras, M. Esashi, Y. Fujiwara, Y. Fukao, S. Hirota, H. Iinuma, K. Ishida, M. Iwasaki, T. Kakurai, S. Kanda, H. Kawai, N. Kawamura, G. M. Marshall, H. Masuda, Y. Matsuda, T. Mibe, Y. Miyake, S. Okada, K. Olchanski, a. Olin, H. Onishi, N. Saito, K. Shimomura, P. Strasser, M. Tabata, D. Tomono, K. Ueno, K. Yokoyama*, and S. Yoshida.

[18] “Development of UV-Assisted Ozone Steam Etching and Investigation of Its Usability for SU-8 Removal.” Journal of Micromechanics and Microengineering, 24, (2014). 035007.

    Shinya Yoshida*, Masayoshi Esashi, and Shuji Tanaka.

[19] “Fabrication of Pierce-Type Nanocrystalline Si Electron-Emitter Array for Massively Parallel Electron Beam Lithography”, IEEJ Transactions on Sensors and Micromachines, 134(6),(2014),146-153

    Hitoshi Nishino*, Shinya Yoshida, Akira Kojima, Nokatsu Ikegami, Shuji Tanaka, Nobuyoshi Koshida and Masayoshi Esashi

[20] “Densified electrochemical sensors based on local redox cycling using vertically separated electrodes for substrate generation/chip collection and extended feedback” Analytical Chemistry, 86 (2014)4016-4023

    Kosuke Ino*, Yusuke Kanno, Taku Nishijo, Hirokazu Komaki, Yuta Yamada, Shinya Yoshida, Yasufumi Takahashi, Hitoshi Shiku, Tomokazu Matsue*

[21] “Highly c-Axis Oriented Monocrystalline Pb(Zr, Ti)O3 Thin Films on Si Wafer Prepared by Fast Cooling Immediately after Sputter Deposition.” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 61 (2014) 1552-8

    Shinya Yoshida*, Hiroaki Hanzawa, Kiyotaka Wasa, Masayoshi Esashi, Shuji Tanaka

[22] “An investigation of the mechanical strengthening effect of hydrogen anneal for silicon torsion bar” Journal of Micromechanics and Microengineering 24 (2014) 105014

    Ryo Hajika, Shinya Yoshida*, Yoshiaki Kanamori, Shuji Tanaka, and Masayoshi. Esashi

[23] “Integration of Boron-Doped Diamond Microelectrode on CMOS-based Amperometric Sensor Array by Film Transfer Technology” Journal of Microelectromechanical Systems 24 (2015) 958-967

    Takeshi Hayasaka, Shinya Yoshida*, Kumi Y. Inoue, Masanori Nakano, Tomokazu Matsue, Masayoshi Esashi, and Shuji Tanaka

[24] “Advanced LSI-based amperometric sensor array with light-shielding structure for effective removal of photocurrent and mode selectable function for individual operation of 400 electrodes” Lab on a Chip, (2015),15, 848-856

    Kumi Y. Inoue*, Masahki Matsudaira, Masanori Nakano, Kosuke Ino, Chika Sakamoto, Yusuke Kanno, Reyushi Kubo, Ryota Kunikata, Atsushi Kira, Atsushi Suda, Ryota Tsurumi, Toshihito Shioya, Shinya Yoshida, Masanori Muroyama, Tomohiro Ishikawa, Hitoshi Shiku, Shiro Satoh, Masayoshi Esashi, Tomokazu Matsue*

[25] “An LSI for Massive Parallel Electron Beam Lithography: Its Design and Evaluation”, IEEJ Transactions on Sensors and Micromachines, (2015) 135, 374-381

     Hiroshi Miyaguchi*, Masanori Muroyama, Shinya Yoshida, Naokatsu Ikegami, Akira Kojima, Ryosuke Kaneko, Kentaro Totsu, Shuji Tanaka, Nobuyoshi Koshida, Masayoshi Esashi,

[26] "Development of ballistic hot electron emitter and its applications to parallel processing: active-matrix massive direct-write lithography in vacuum and thin-film deposition in solutions", Journal of Micro/Nanolithography, MEMS, and MOEMS, (2015) 14, 031215

    Nobuyoshi Koshida*, Akira Kojima, Naokatsu Ikegami, Ryutaro Suda, Mamiko Yagi, Junichi Shirakashi, Hiroshi Miyaguchi, Masanori Muroyama, Shinya Yoshida, Kentaro Totsu, Masayoshi Esashi

[27] “Fabrication and Characterization of Large Figure-of-Merit Epitaxial PMnN-PZT/Si Transducer for Piezoelectric MEMS Sensors”, Sensors & Actuators: A. Physical, (2016) 239, 201-208.

    Shinya Yoshida*, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka

[28] “Development of a 17×17 Parallel Electron Beam Lithography System”, IEEJ Transactions on Sensors and Micromachines, (2016), 136, 413-419 (In Japanese)

    Hiroshi Miyaguchi*, Masanori Muroyama, Shinya Yoshida, Naokatsu Ikegami, Akira Kojima, Shuji Tanaka, Masayoshi Esashi

[29] “Sputter Deposition of YSZ Epitaxial Buffer Layer at Wafer Level for Piezoelectric MEMS utilizing PZT-based Monocrystalline Thin Film” IEEJ Transactions on Sensors and Micromachines, (2016) 136, 437-442. (In Japanese)

    Shinsuke Nishizawa*, Shinya Yoshida, Kiyotaka Wasa, Shuji Tanaka

[30] “Structure and Ferroelectric Properties of High Tc BiScO3-PbTiO3 Epitaxial Thin Films” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, (2016) 63, 1636-1641

    Kiyotaka Wasa, Shinya Yoshida*, Hiroaki Hanzawa, Hideaki Adachi, Toshiyuki Matsunaga, and Shuji Tanaka

[31] “Enhanced Curie Temperature and High Heat Resistivity of PMnN-PZT Monocrystalline Thin Film on Si”, Sensors & Actuators: A. Physical, (2016) 251, 100-107.

    Shinya Yoshida*, Hiroaki Hanzawa, Kiyotaka Wasa, Shuji Tanaka

[32] "Fabrication of Pierce-Type Nanocrystalline Si Electron-Emitter Array for Massively Parallel Electron Beam Lithography.", Electronics and Communications in Japan, (2016) 99, 11–19    (Translated from Denki Gakkai Ronbunshi, Vol. 134-E, No. 6, June 2014, pp. 146–153)

    H. Nishino*, S. Yoshida, A. Kojima, N. Ikegami, S. Tanaka, N. Koshida, M. Esashi.

[33] "Development of buffer layer structure for epitaxial growth of (100)/(001)Pb(Zr,Ti)O3-based thin film on (111)Si wafer.", Japanese Journal of Applied Physics, (2017) 56, 071501，"Spotlights"論文に選ばれました。

    Takeshi Hayasaka, Shinya Yoshida* and Shuji Tanaka

[34] "Epitaxial PMnN-PZT/Si MEMS Ultrasonic Rangefinder with 2 m Range at 1 V Drive", Sensors & Actuators: A. Physical, (2017) 266, 352-360.

    Zhen Zhou, Shinya Yoshida* and Shuji Tanaka

[35] “Epitaxial growth of metallic buffer layer structure and c-axis oriented PMnN-PZT thin film on Si for high performance pMUT”, Japanese Journal of Applied Physics, (2017) 56, 127201 

    Pham Ngoc Thao*, Shinya Yoshida and Shuji Tanaka

[36] “Concept Proof of Low-Energy Consumption and Compact Ingestible Thermometer Based on Gastric Acid Power Generation” IEEJ Transactions on Sensors and Micromachines, (2018) 138, 164-169

    Shinya Yoshida*, Hiroshi Miyaguchi, Tsutomu Nakamura

[37] “Investigation of Piezoelectricity and Curie Temperature of Pb(Mg1/3,Nb2/3)O3-PbTiO3 Epitaxial Thin Film on Si Prepared by Sputter Deposition with Fast Cooling”, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,  (2018) 65, 1695-1702 

   Shinya Yoshida*, Takumi Morimura, Kiyotaka Wasa and Shuji Tanaka

[38] “Fabrication and characterization of PZT fibered-epitaxial thin film on Si for piezoelectric micromachined ultrasound transducer” Micromachines, (2018) 9, 455

  Pham Ngoc Thao*, Shinya Yoshida and Shuji Tanaka

[39] “Development of Tablet-Shaped Ingestible Core-Body Thermometer Powered by Gastric Acid Battery”, IEEE Sensors Journal, (2018) 18, 9755

  Shinya Yoshida*, Hiroshi Miyaguchi, Tsutomu Nakamura

[40] “Prototyping of an All-pMOS-Based Cross-Coupled Voltage Multiplier in Single-Well CMOS Technology for Energy Harvesting Utilizing a Gastric Acid Battery”, Electronics, (2019) 8, 804

  Shinya Yoshida*, Hiroshi Miyaguchi, Tsutomu Nakamura

[41] “Fabrication of c-Axis-Oriented PZT-Based Monocrystalline Thin Film with High Insulation Property on Si Substrate,” (in Japanese) IEEJ Trans. Sensors Micromachines, (2020) 140, pp. 137–143 

  Ryo Ebihara*, Shinya Yoshida and Shuji Tanaka,

[42] “Feasibility Study of Ultrasonic Biometrics Based on Finger Vessel Imaging by Epitaxial-PZT/Si Piezoelectric Micromachined Ultrasonic Transducer” Sensors & Actuators: A. Physical, (2020) 312, p. 112145.

   Ziyi Liu*, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryoichi Takayama and Shuji Tanaka

[43] “Development of Sputter Epitaxy Technique of Pure-Perovskite (001)(100)-Oriented Sm-doped Pb(Mg1/3, Nb2/3)O3–PbTiO3 on Si,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control, (2020) 67, p. 2738–2744. 

Xuanmeng Qi, Shinya Yoshida* and Shuji Tanaka

[44] “Development of Mechanically-Robust pMUT Based on Island-Shaped Monocrystalline PZT Thin Film Partially Covered with Polyimide” Journal of Micromechanics and Microengineering, (10.1088/1361-6439/abc52f), (2020) 30, p. 125015.

Pham Ngoc Thao, Shinya Yoshida*, Shuji Tanaka

[45] “Development of Ingestible Thermometer With Built-in Coil Antenna Charged by Gastric Acid Battery and Demonstration of Long-Time in Vivo Telemetry,” IEEE Access, (2021), vol. 9, pp. 102368–102377

S. Yoshida*, H. Miyaguchi, and T. Nakamura,

[46] “Sputter deposition and characterization of ‘epi-poly’ Pb(Zr, Ti)O 3 thin film on (100) Si substrate for MEMS applications,” Jpn. J. Appl. Phys. (Oct. 2021), vol. 60, no. 10, p. 101005, 

Yu Katsumata, Shinya Yoshida*, Shuji Tanaka

[47] “Fabrication and Characterization of Annular-Shaped Piezoelectric Micromachined Ultrasonic Transducer Mounted with Pb(Zr,Ti)O3-Based Monocrystalline Thin Film”, Journal of Micromechanics and Microengineering, vol. 31, no. 12, p. 125014, Dec. 2021

Ziyi Liu, Shinya Yoshida* and Shuji Tanaka

[48] “Sputter Deposition and Characterization of Sm-Doped Pb(Mg 1/3 , Nb 2/3 )O₃–PbTiO₃ Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol. 69, no. 5, pp. 1821–1828, May 2022.

      X. Qi, S. Yoshida*, and S. Tanaka,

[49] “Fabrication and characterization of row-column addressed pMUT array with monocrystalline PZT thin film toward creating ultrasonic imager,” Sensors Actuators A Phys., vol. 342, no. May, p. 113666, Aug. 2022

     Z. Liu, S. Yoshida*, D. A. Horsley, and S. Tanaka,

[50] “Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking,” J. Micromechanics Microengineering, vol. 34, no. 3, 2024, doi: 10.1088/1361-6439/ad2306.

    X. Qi, S. Yoshida, S. Risquez, A. Ghosh, M. Moridi, and S. Tanaka,

[51] “Influence of underlayer roughness on the properties of Sc0.4Al0.6N thin films prepared via sputter deposition,” Jpn. J. Appl. Phys., vol. 63, no. 5, p. 055501, May 2024, doi: 10.35848/1347-4065/ad3da3.

　A. Teshigahara, T. Enomoto, H. Yamada, and S. Yoshida 

[52] “Fabrication and characterization of monocrystalline-based composite Pb(Zr, Ti)O3 thin film patterned with polycrystalline crack stopper structure,” Jpn. J. Appl. Phys., Accepted, Jun. 2024, doi: 10.35848/1347-4065/ad56e9.

　S. Yoshida*, Y. Katsumata, and S. Tanaka,