６．国際会議プロシーディングス

[1] “Reversible Electrical Modification on Conductive Polymer for Scanning Multiprobe Data Storage.”, Proceedings of The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2005), 1300-1303

    Shinya Yoshida, Takahito Ono, Shuichi Oi, Masayoshi Esashi

[2] “Photothermal Transducer Based on Ultrathin Bimetal Si Resonator.”, Proceedings of the 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), 639-642

    Takahito Ono, Shinya Yoshida, Yusuke Kawai,Masayoshi Esashi

[3] “Conductive Polymer Patterned Media for Scanning Multiprobe Data Storage.”, Proceedings of the 14th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2007), 1645-1648

    Shinya Yoshida, Takahito Ono, Masayoshi Esashi

[4] “CONDUCTIVE POLYMER PATTERNED MEDIA FABLICATED USING DIBLOCK COPOLYMER LITHOGRAPHY FOR SCANNING MULTIPROBE DATA STORAGE.”, The proceedings of the 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), 1-4

    Shinya Yoshida, Takahito Ono, Masayoshi Esashi

[5] “SIMPLE REMOVAL TECHNOLOGY USING OZONE SOLUTION FOR CHEMICALLY-STABLE POLYMER USED FOR MEMS.”, The proceedings of the 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011), 324-327,

    H. Yanagida, S. Yoshida, M. Esashi, S. Tanaka

[6] “CONFORMAL COATING OF POLY(GLYCIDYL METHACRYLATE) AS A LITHOGRAPHIC POLYMER BY INITIATED CHEMICAL VAPOR DEPOSITION. The proceedings of the 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2011), 994-997

    S. Yoshida, T. Kobayashi, M. Kumano, and M. Esashi

[7] “Fabrication of High-aspect-ratio PZT Structure by Nanocomposite Sol-gel Method for Laterally-driven Piezoelectric MEMS switch.”, The proceedings of 7th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS 2012), 321-326

    Nan Wang, Shinya Yoshida, Masafumi Kumano, Yusuke Kawai, and Masayoshi Esashi

[8] “Fabrication of high-aspect-ratio PZT structure by sol-gel process using Si mold for MEMS transducers.”, The proceedings of International Symposium on Test Automation Instrumentation 2012 (ISTAI'2012), 214-218,

    Wang Nan, Shinya Yoshida, Masafumi Kumano, Masayoshi Esashi

[9] “HYDROGEN ANNEALING PROCESS TO IMPROVE FRACTURE TOUGHNESS OF SILICON COIL SPRING FOR MECHANICAL ENERGY STORAGE APPLICATION.” The proceedings of the 12th International Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (Power MEMS 2012), 279-282

    T. Suzuki, T. Hayashi, N. Kogushi, Y. Saitoh, R. Hajika, S. Yoshida, M. Moriyama, K. Totsu, Y. Kanamori and S. Tanaka

[10] “LATERALLY-DRIVEN PIEZOELECTRIC BIMORPH MEMS ACTUATOR WITH SOL-GEL-BASED HIGH-ASPECT-RATIO PZT STURUCTURE.” The Technical Digest of The 26th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2013), 197-200

    N. Wang, S. Yoshida, M. Kumano, Y. Kawai, S. Tanaka and M. Esashi

[11] “MECHANICAL STRENGTHENING OF SILICON TORSION BAR OF MEMS SCANNING MIRROR BY HYDROGEN ANNEAL.”, The Technical Digest of The 26th IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2013), 425-428

    R. Hajika, S. Yoshida, W. Makishi, Y. Kanamori, S. Tanaka, and M. Esashi

[12] “Development of maskless electron-beam lithography using nc-Si electron-emitter array”, Proc. SPIE 8680, Alternative Lithographic Technologies V, 86800I

    A. Kojima, N. Ikegami, T. Yoshida, H. Miyaguchi, M. Muroyama, H. Noshino, S. Yoshida, M. Sugata, S. Cakir, H. Ohyi, N. Koshida, M. Esashi

[13] “UV-ASSISTED INTERMITTENTLY-SPINNING OZONE STEAM ETCHING OF SU-8 FOR MICROMOLDING PROCESS”, The proceedings of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2013), 1621-1624

    Shinya Yoshida, Kei Suzuki, Masayoshi Esashi, and Shuji Tanaka

[14] “INTEGRATION OF DIAMOND MICROELECTRODES ON CMOS-BASED AMPEROMETRIC BIOSENSOR ARRAY BY FILM TRANSFER TECHNOLOGY.” The proceedings of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), 322-325

    Takeshi Hayasaka, Shinya Yoshida, Kumi Y. Inoue, Masanori Nakano, Tomohiro Ishikawa, Tomokazu Matsue, Masayoshi Esashi, and Shuji Tanaka

[15] “DEVELOPMENT OF MEMS PIERCE-TYPE NANOCRYSTALLINE SI ELECTRON-EMITTER ARRAY FOR MASSIVELY PARALLEL ELECTRON BEAM DIRECT WRITING.”, The proceedings of the 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014), 467-470

    Hitoshi Nishino, Shinya Yoshida, Akira Kojima, Naokatsu Ikegami, Nobuyoshi Koshida, Shuji Tanaka, Masayoshi Esashi

[16] “Massively parallel electron beam direct writing (MPEBDW) system based on micro-electro-mechanical system (MEMS)/nanocrystalineSi emitter array.” Proc. SPIE, Alternative Lithographic Technologies VI, 9049, (2014) 904918

    Akira Kojima, Naokatsu Ikegami, Takashi Yoshida, Hiroshi Miyaguchi, Masanori Muroyama, Hitoshi Nishino, Shinya Yoshida, Masanori Sugata, Hideyuki Ohyi, Nobuyoshi Koshida, Masayoshi Esashi

[17] “Highly c-Axis Oriented Monocrystalline Pb(Zr, Ti)O3 based Thin Film on Si Wafer by Sputter Deposition with Fast Cooling Process” The proceedings of 2014 IEEE International Ultrasonics Symposium, (2014) 907-910,

    Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa and Shuji Tanaka

[18] “Mechanical Strengthening of Silicon Torsion Bar of Scanning Micro Mirror by Hydrogen Anneal”, The proceeding of the 21st International Display workshops (IDW ’14) (2014) 1283-1286.

    Shinya Yoshida, Shuji Tanaka, Masayoshi Esashi

[19] “LARGE FIGURE-OF-MERIT EPITAXIAL PB(MN,NB)O3-PB(ZR,TI)O3/SI TRANSDUCER FOR PIEZOELECTRIC MEMS SENSORS.”, The proceeding of 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015), (2015), W2P.018

    Hiroaki Hanzawa, Shinya Yoshida, Kiyotaka Wasa and Shuji Tanaka

[20] “Structure and ferroelectric properties of high Tc Bi(Me)O3-PbTiO3 single crystal thin films”, The proceeding of 2015 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF), International Symposium on Integrated Functionalities (ISIF), and Piezoelectric Force Microscopy Workshop (PFM), (2015), 40-43.

    K. Wasa, H. Hanzawa, S. Yoshida, S. Tanaka, H. Adachi, & T. Matsunaga.

[21] “Development of a MEMS electrostatic condenser lens array for nc-Si surface electron emitters of the massive parallel electron beam direct-write system”, The proceeding of SPIE Advanced Lithography, CONFERENCE 9777 Alternative Lithographic Technologies, (2016) 1-12

    Akira Kojima*, Naokatsu Ikegami, Takashi Yoshida, Hiroshi Miyaguchi, Masanori Muroyama, Shinya Yoshida, Kentaro Totsu, Nobuyoshi Koshida and Masayoshi Esashi

[22] “Feasibility Study of Ingestible Sensor Platform Powered by Gastric Acid Battery for Daily Health Care”, Proceedings of the 16th International Conference on Nanotechnology, (2016) 724-727

    S. Yoshida, H. Miyaguchi and T. Nakamura

[23] "Fabrication of Through Silicon Via with Highly Phosphorus- Doped Polycrystalline Si Plugs for Driving an Active-matrix Nanocrystalline Si Electron Emitter Array", Proceedings of the 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), (2016), 17–20.

    N. Ikegami, T. Yoshida, A. Kojima, H. Miyaguchi, M. Muroyama, S. Yoshida, K. Totsu, N. Koshida, and M. Esashi

[24] “MONOCRYSTALLINE PMNN-PZT THIN FILM ULTRASONIC RANGEFINDER WITH 2 METER RANGE AT 1 VOLT DRIVE”, The proceedings of Transducers 2017, (2017) 167-170,  

 Zhen Zhou, Shinya Yoshida, and Shuji Tanaka

[25] “Development of Basic System of Ingestible Core Body Thermometer with Small Size and Low Energy Consumption Powered by Gastric Acid Battery”, The proceedings of IEEE Sensors 2017, (2017) 1248-1250

Shinya Yoshida, Hiroshi Miyaguchi and Tsutomu Nakamura

[26] “Sputter Epitaxy of Pb(Zr,Ti)O3 and Pb(Mg1/3,Nb2/3)O3-PbTiO3 Thin Films on Si for High-Performance Piezoelectric MEMS”, The proceedings of Smart Systems Integration 2018, (2018) 233-239

Shinya Yoshida and Shuji Tanaka

[27] “Proof of Concept for Tablet-Shaped Ingestible Core-Body Thermometer with Gastric Acid Battery”, Proceedings of The 2019 IEEE 1st Global Conference on Life Sciences and Technologies (LifeTech 2019), (2019) 182-184

Shinya Yoshida, Hiroshi Miyaguchi and Tsutomu Nakamura

[28] “DEVELOPMENT OF MECHANICALLY-ROBUST PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) WITH ISLAND-SHAPED PZT MONOCRYSTALLINE THIN FILM” The proceedings of Transducers 2019, (2019) 833-836

Pham N. Thao, Shinya Yoshida, and Shuji Tanaka

[29] “CHARACTERIZATION OF EPITAXIAL-PZT/SI PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) AND ITS PHASED ARRAY SYSTEM”, The proceedings of Transducers 2019, (2019) 246-249

      Ziyi Liu, Shinya Yoshida, Toshiaki Horie, Shoji Okamoto, Ryouichi Takayama and Shuji Tanaka

[30] “Commercial Production of Epitaxial PZT for Piezoelectric MEMS Applications” The proceedings of IEEE IFCS-ISAF 2020, Paper ID: 4106

Ryoma Miyake, Mario Kiuchi, Shinya Yoshida, Shuji Tanaka, and Glen R. Fox

[31] “Low-k PZT film for commercial use” The proceedings of 2020 IEEE International Ultrasonics Symposium, Paper ID: 1146,

Mario Kiuchi, Ryoma Miyake, Shinya Yoshida, Shuji Tanaka, Tsuyoshi Takemoto, Yukitaka Yamaguchi, Kenji Komaki

[32] “Epitaxial Growth of Pure-Perovskite-Phase Sm-Doped Pb(Mg1/3Nb2/3)O3-PbTiO3 Thin Film on Si by Magnetron Sputter using Powder Target”, Abstract of Electroceramics XVII, Paper ID: 30

Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka

[33] “SM-DOPED PB(MG 1/3, NB2/3 )O3–PBTIO3  SPUTTER-EPITAXY ON SI TOWARDS GIANT-PIEZOELECTRIC THIN FILM FOR MEMS” The proceedings of IEEE MEMS2021, 654-657

Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka

[34] “Fabrication of Monocrystalline-Based Composite PZT Thin Film with Polycrystalline Crack Stopper Structure,” The proceedings of 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), Jan. 2022, pp. 543–546, doi: 10.1109/MEMS51670.2022.9699644.

     Yu Katsumata, Shinya Yoshida, Shuji Tanaka

[35] “EPITAXIAL PB(ZR,TI)O3-BASED PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER FABRICATED ON SILICON-ON-NOTHING (SON) STRUCTURE”, The proceedings of IEEE MEMS 2023, pp. 139-142

   Takuma Sekiguchi, Shinya Yoshida, Yoshiaki Kanamori, and Shuji Tanaka

[36] “DEVELOPMENT OF PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER WITH DUAL HETEROGENEOUS PIEZOELECTRIC THIN FILM STACKING,” The proceedings of Transducers 2023, no. June, pp. 857–860, 2023. 

  X. Qi, S. Yoshida, M. Moridi, S. Risquez, A. Ghosh, and S. Tanaka

[37] “EPITAXIAL SM-DOPED PMN-PT FILM WITH HIGH PIEZOELECTRIC CONSTANT FOR MEMS APPLICATION,” Proc. IEEE MEMS2024, vol. 23, no. January, pp. 765–768, 2024. 

Kai Fukushi, Shinya Yoshida, Xuanmeng Qi, Shuji Tanaka