Instruments
Atomic Force Microscope (AFM) (2013)
Nanosize Scribing & Imaging
RF Magnetron Sputter for Metal & Insulator, 3 guns (2018)
Thin film layer deposition
UV exposure with Mask aligner (2016)
Photolithography
UV-Vis. Spectrometer+Integrating Sphere (2016)
Transmittance, Reflectance, Color gamnut measurement
Polarizing Optical Microscope (2013)
Reflective and Transmittive modes
Metallic Optical Microscope (2018)
Photolithography results check
Automatic 4 Point probe (2021)
Sheet resistance measurements
LCR meter 3 MHz-3.3 GHz (2018)
Dielectric spectroscopy, Impedance measurement
Source Measurement Unit (2023)
Transistor I-V measurement
405 nm Laser with long coherence length > 25 m (2020)
Laser Interference Lithography (LIL)
Abbe Refractometer (2014)
Refractive Index Measurement
Lock-in-Amplifier (2013)
Optical Signal Aplification
Plasma treatment machine (2016)
Surface treatment and cotrol hydrophobicity
Digital Centrifuger (2021)
Nanomaterials synthesis
Programmable Spin coater (2022)
Surface coating
Constant Temperataure & Humidity Chamber (2016)
Reliability test
Convection Oven (2016)
Baking, Drying, Aging
High Temperature Furnace (2020)
Thermal annealing
Measurement instruments
Atomic Force Microscope (Park System) 2013
Polarizing Optical Microscope 2 (Nickon) 2013
He-Ne Laser 2 (Thorlab) 2013
Voltage amplifier: 1000 V 3 (TREK) 2013
Anti-vibration Optical Table 4 (Daeil) 2013
Babinet-Soleil compensator (Thorlab) 2013
Lock in Amplifier (Standford) 2013
Abbe refractometer (Kruess) 2014
LCR meter: 1 mHz-5.5 MHz (nF) 2015, 3 MHz-3.3 GHz (Hioki) 2018Â
Arbitrary function generator 2 (Agilent) 2015
Digital Oscilloscope 2 (Tektronix) 2015
Variable LC retarder (Thorlab) 2016
USB BNC DAQ board (National Instrument) 2016
UV-Vis spectrometer + Integrating sphere (Shimatzu) 2016
Auto 4-point probe (AIT) 2021
Polarimeter 2 (Thorlab) 2022
405 nm laser with coherence length > 25 m (Toptica) 2020
UV puck (EIT) 2021
pH meter 2022
Source Measurement Unit for I-V measurement (Keithley) 2023
Fabrication instruments
Heating stage 2 (Linkam) 2015
Spin coater 2 (Nanotech) 2015
Convection oven (4-Science) 2016
Plasma treatment machine (Plasma Life) 2016
1D Film stretching machine (Clean High Tech) 2016
Roll laminator 2016
UV exposure and mask aligner (Jaesung) 2016
RF magnetron sputter for metal & insulator (Daeki High Tech) 2018
Clean fume hood 3 (CHC) 2019
High temperatuare furnace 2020
Centrifuger 2021
Reliability test instruments
Pencil hardness tester (Lab & Tools) 2015
UV reliability chamber (Lab & Tools) 2015
Humidity chamber (4-Science) 2016
Software
LCD simulator: Techwiz 2D (SANAYI) 2013 + Ray trace Module 2022
LCD simulator: Techwiz 3D (SANAYI) 2015
LCD simulator: Techwiz 1D (SANAYI) 2016
Comsol: Multiphysics-Optics modue 2019
OLED simulator: Techwiz OLED (SANAYI) 2022
TCAD: Silvaco 2023