Instruments

Atomic Force Microscope (AFM) (2013)

Nanosize Scribing & Imaging

RF Magnetron Sputter for Metal & Insulator, 3 guns (2018)

Thin film layer deposition

UV exposure with Mask aligner (2016)

Photolithography

UV-Vis. Spectrometer+Integrating Sphere (2016)

Transmittance, Reflectance, Color gamnut measurement

Polarizing Optical Microscope (2013)

Reflective and Transmittive modes

Metallic Optical Microscope (2018)

Photolithography results check

Automatic 4 Point probe (2021)

Sheet resistance measurements

LCR meter 3 MHz-3.3 GHz (2018)

Dielectric spectroscopy, Impedance measurement

Source Measurement Unit (2023)

Transistor I-V measurement

405 nm Laser with long coherence length > 25 m (2020)

Laser Interference Lithography (LIL)

Abbe Refractometer (2014)

Refractive Index Measurement

Lock-in-Amplifier (2013)

Optical Signal Aplification

Plasma treatment machine (2016)

Surface treatment and cotrol hydrophobicity

Digital Centrifuger (2021)

Nanomaterials synthesis

Programmable Spin coater (2022)

Surface coating

Constant Temperataure & Humidity Chamber (2016)

Reliability test

Convection Oven (2016)

Baking, Drying, Aging

High Temperature Furnace (2020)

Thermal annealing

Measurement instruments

Fabrication instruments

Reliability test instruments

Software