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B1實驗室規範 Regulation of B1 Laboratory
B1實驗室機台使用規定 (Regulation of B1 Lab Machines) 機台使用者切結書 (User Recognizance)
半導體實驗教材 (Lectures of Semiconductor experiments)
量測機台(Measurement)
黃光製程(Lithography Room)
黃光流程解說1 (Part1) 黃光流程解說2 (Part2) 黃光機台解說 (Procedure)
濺鍍機台(RF-SPUTTER)
濺鍍流程解說1 (Part1) 濺鍍流程解說2 (Part2) 濺鍍機台解說 (Procedure)
DC power與RF power原理(Theorems of DC power & RF power)
蒸鍍機台(Thermal)
01 開機順序 (Power-ON) 02 破真空步驟 (Breaking Vacuum)
03 放Boat&Wafer (Put Boat&Wafer) 04 Process Flow (Process Flow) 濺鍍機台解說 (Sputter Procedure)
Wet Bench
RCA操作流程解說 (Operational Procedure) 酸鹼中和流程解說 (Neutralisation Procedure)
LAPS
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