RESEARCH

Next-Generation Transport System: Maglev and Motion Control 

We are dedicated to developing next-generation semiconductor and display manufacturing robots that achieve high speed, high accuracy, and high cleanness, enabled by magnetic levitation and advanced motion control technologies.

•  Through magnetic levitation, we realize non-contact, ultra-precise transportation methods.

•  By employing advanced motion control techniques, we pursue the simultaneous achievement of

 high- speed operation and vibration suppression.

•  Furthermore, we develop robust control methodologies that ensure high precision even under

 external disturbances and dynamic variations in system characteristics.