XPS Data Analysis Resources
Copy For XPS Publications
X-ray Photoelectron Spectroscopy. XPS spectra were collected on a PHI Genesis spectrometer using an aluminum anode X-ray source with a photon energy of 1486.6 eV. Survey spectra were collected with a 25 W, 15 kV source producing a 100 µm beam with a scan range of 1100 to 0 eV with a step size of 0.5 eV and pass energy of 280 eV. High resolution spectra were collected with a step size of step size of 0.1 eV and pass energy of 26 eV.
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This work was performed in part at the Surface Analysis Laboratory in the Department of Chemistry at Virginia Tech, which is supported by the National Science Foundation under Grant No. CHE-1531834.
If using CasaXPS for data analysis, please cite:
Fairley, Neal, et al. "Systematic and collaborative approach to problem solving using X-ray photoelectron spectroscopy." Applied Surface Science Advances 5 (2021): 100112.