PHI Genesis [XPS]
PHI Genesis [XPS]
Signal from top 5-10 nm of surface
5 µm minimum beam size
Hot (500°C) / Cold (-100°C) Stage
Inert sample transfer vessel for samples sensitive to atmosphere
Phase identificaton and quantification
Graphite monochromator for increased S/N
6-position automated sample changer with integrated spinner
Tender X-ray emission spectrometer (2-5 keV)
~1 eV energy resolution
Sensitive for P and S
Hard X-ray emission spectrometer (4.5-25+ keV)
Bulk (several µm) measurement
Lanthanide sensitivity