Facility
MOCVD system
MOCVD system
High-Resolution XRD
High-Resolution XRD
Photolithography system
Photolithography system
Electron Beam Lithography system
Electron Beam Lithography system
ICP Dry etching system
ICP Dry etching system
Scanning Electron Microscope (SEM)
Scanning Electron Microscope (SEM)
Electron Beam Deposition system
Electron Beam Deposition system
Rapid Thermal Annealing system
Rapid Thermal Annealing system
Atomic Layer Deposition (ALD) system
Atomic Layer Deposition (ALD) system
Sputter deposition system
Sputter deposition system
Semiconductor Analyzer System
Semiconductor Analyzer System
Hall Effect Measurement System
Hall Effect Measurement System