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UF-Electron Device Lab
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UF-Electron Device Lab
Home (ホーム)
People (メンバー)
Publications (論文)
Presentations (学会発表)
Invited Works (招待論文・招待講演)
Facility
Contact
More
Home (ホーム)
People (メンバー)
Publications (論文)
Presentations (学会発表)
Invited Works (招待論文・招待講演)
Facility
Contact
Facility
MOCVD system
High-Resolution XRD
Photolithography system
Electron Beam Lithography system
ICP Dry etching system
Scanning Electron Microscope (SEM)
Electron Beam Deposition system
Rapid Thermal Annealing system
Atomic Layer Deposition (ALD) system
Sputter deposition system
Semiconductor Analyzer System
Hall Effect Measurement System
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