Start phase separator

Look at the plasma water chiller

Open LN2 line (wait for two lights)

Bake sample if necessary

Check all valves

Check all pressures including O₂ line (should be around ~2×10⁻²) - Loadlock downmost screens

Check water flow and chiller

Turn off BFM 

Start rotation CCW

Open RHEED pump (if using)

Check pressure on O₂ line

Open metal valve (check pressure after slightly opening) - Metal valve is connected in between needle valve and chamber

Turn needle valve closed 2.5 turns - (Clockwise from bottom view - should be tighten)

Close O₂ gas pump valve - (The switch is with power supply board)

Open O₂ tank - (Anticlockwise)

Make sure the regulator is 1.4-1.5 (Black capped regulator)

Wait for pressure to reach 1–3×10⁻⁸

Make sure the O₂ flow meter reeding shows 1.2-1.4 sccm by slightly opening needle valve - roughly 1.5 turn- (AntiClockwise from bottom view - should be loosen)

Pressure might go down to around 2E-6 order

Turn on RF source and slowly increase to 250 W(20W  then 3s wait again 20W then 3s wait....)

If plasma does not strike, quickly open the needle valve slightly

Slowly increase flow through the needle valve to 2.5 sccm

Wait ~2 minutes with stable flow, then start the recipe.

Close the metal valve

Check that the pressure is decreasing

Close the O₂ tank

Open the needle valve 2.5 turns

Close the RHEED pump

Open O₂ gas pump valve - (The switch is with power supply board)

Stop rotation (at ~230°)

Cool Down everything