Cleaning and Bonding
Cleaning and Bonding
Take the sample write G on the backside
Put that into the Teflon boat in a small beaker
Take a one side polished Si wafer and put directly into the big beaker with a glass spacer
Both big and small beaker into the socination machine Ace+Methanol+IPA 5 minutes one after another
While cleaning, in the mean time heat the hotplate to 185
Just before bonding clean the (in bonding) pairs of twizers
Raise the temperature to 195
Blow dry the sample
Place the silicon wafer on top of the hotplate facing non polished side up
Place the sample on the silicon wafer facing front side up
Take Indium and start bonding
When bonding is finshed, keep both samples and wafer for a while on the hotplate