This course is designed for advanced undergraduate students or first-year graduate students who wish to gain an in-depth understanding of semiconductor and microelectronic fabrication processes. It covers the basic unit processes required for fabricating integrated circuits and various devices, focusing on the underlying physical and chemical principles and the equipment used to implement these processes. Processes such as diffusion, oxidation, lithography, and deposition are explored as examples, and the course delves into how these processes are integrated, with a particular focus on CMOS transistors. Advanced topics such as thermal budget, process modules, advanced structural designs, and channel strain techniques are also included, providing a comprehensive understanding of micro- and nanoscale fabrication processes.
Thursday 15:00-16:15, 16:30-17:45
Friday 15:00-16:15, 16:30-17:45
Friday 15:00-16:15, 16:30-17:45
Thursday 15:00-16:15, 16:30-17:45
Thursday 12:00-13:15, 13:30-14:45