๐ October 2026 (Exact date to be announced)
The North American Plasma Etch Exchange (NAPEX) is excited to announce its inaugural Virtual Symposium, bringing together the plasma processing community from across North America for a day of technical presentations, discussion, and collaboration.
Building upon the successful tradition of the NNCI Etch Symposium, the NAPEX Virtual Symposium 2026 will provide an open forum for researchers, engineers, facility professionals, students, equipment manufacturers, and industry partners to exchange ideas, discuss emerging challenges, and explore the latest advances in plasma etching and related plasma processing technologies.
Advanced plasma etching for semiconductor manufacturing
Plasma processing of emerging materials
Atomic layer etching (ALE)
Cryogenic plasma etching
Dielectric and metal etching
Wide-bandgap semiconductor processing (SiC, GaN, AlN)
MEMS, photonics, quantum, and advanced packaging applications
Plasma diagnostics and process characterization
Artificial intelligence and machine learning for plasma processing
Process integration, yield, and manufacturability
Sustainability in plasma processing
Best practices from nanofabrication facilities
Invited presentations from leading researchers and industry experts
Technical presentations from academia, national laboratories, and industry
Student research presentations
Vendor technology updates
Interactive panel discussions
Community networking and open technical discussions
Opportunities to establish new collaborations across institutions
The symposium is open to:
University researchers
Graduate and undergraduate students
Nanofabrication facility staff
Process engineers
Semiconductor industry professionals
Equipment manufacturers
National laboratory researchers
Government scientists
Anyone interested in plasma etching and plasma processing technologies
A call for abstracts will be announced soon. We encourage members of the plasma processing community to share recent research, novel process developments, equipment innovations, and technical case studies.
Registration information, the technical program, invited speakers, and abstract submission details will be announced in the coming months.
We look forward to welcoming the plasma processing community to the first NAPEX Virtual Symposium as we begin a new chapter of collaboration, technical exchange, and innovation.
Visit this page regularly for updates, or contact the NAPEX organizing committee if you are interested in presenting, sponsoring, or participating in the symposium.