NAPEX is led by a volunteer team of researchers, engineers, and nanofabrication facility professionals from leading North American universities. Our team brings decades of combined experience in plasma etching, semiconductor manufacturing, micro- and nanofabrication, process development, facility operations, and user support.
Representing diverse research institutions and technical backgrounds, we are committed to fostering collaboration between academia, industry, and national laboratories. Through technical discussions, workshops, and community engagement, we aim to accelerate innovation, share best practices, and address emerging challenges in plasma etch technology.
Together, we strive to build an open and collaborative community that advances plasma processing science while supporting the next generation of researchers and engineers.
Ling Xie
Harvard University
lxie@cns.fas.harvard.edu
Lavendra Mandyam
Stanford University
lavendra@stanford.edu