After a silicon wafer has been suitably augmented with dopants to display the requisite electrical resistance characteristics, it is treated through one of several different coating processes. Photolithography and photoetching are among the most common surface engineering methods used to develop nanoscale integrated circuits on semiconducting substrates by coating the surface with a light-sensitive material and applying a photoresistive mask to generate electronic patterns. Secondary ion mass spectrometry (SIMS) uses a miniscule bombardment of primary ions to analyse the uppermost layers of a substrate material. SIMS mass spectrometers are widely used to assess depth profiles of ion implants, as well as depth profiles of multi-layered stacks, MBE MOCVD (molecular beam epitaxy metal oxide carbon vapour deposition), or magnetron sputtered grown layers for example. SIMS depth profiling reveals the atoms/cc as a function of depth in an implant. For multilayer stacks, SIMS reveals the degree of diffusion between layers providing vital information on the growth process quality. A complimentary technique to SIMS is Temperature programmed desorption (TPD). The TPD Workstation measures desorbing species as a function of temperature from samples at UHV from ambient temperature up to a maximum 1000°C with rapid data acquisition of up to 500 data points per second. The TPD profile data reveal further details of the thin film growth process.
Applications of mass spectrometry in proteomics - Characterization of proteins and protein complexes, sequencing of peptides, and identification of posttranslational modifications.
Applications of mass spectrometry in metabolomics - Cancer screening and diagnosis, global metabolic fingerprinting analysis, biomarker discovery and profiling, biofuels generation and use, lipidomics studies, and metabolic disorder profiling.
Applications of mass spectrometry in environmental analysis - Drinking water testing, pesticide screening and quantitation, soil contamination assessment, carbon dioxide and pollution monitoring, and trace elemental analysis of heavy metals leaching.
Applications of mass spectrometry in pharmaceutical analysis - Drug discovery and absorption, distribution, metabolism, and elimination (ADME) studies, pharmacokinetic and pharmacodynamic analyses, metabolite screening, and preclinical development.
Applications of mass spectrometry in forensic analysis - Analysis of trace evidence (e.g., fibers in carpet, polymers in paint), arson investigation (e.g., fire accelerant), confirmation of drug abuse, and identification of explosive residues (bombing investigation).
Clinical applications of mass spectrometry - Clinical drug development, Phase 0 studies, clinical tests, disease screening, drug therapy monitoring, analysis of peptides used for diagnostic testing, and identification of infectious agents for targeted therapies.
Product Name: SIMS Mass Spectrometer
Optical design: echelle spectrograph
Aperture: f/7
Focal length: 150 mm
Slit width: 35 µm x 35 µm
Wavelength range: 220-800 nm
Spectral resolving power: 6,000
Spectral resolution FWHM: 36-133 pm
Absolute accuracy: spectral resolution / 4
Order crosstalk: 5 x 10-3
Stray light: 1 x 10-5
Detector: CCD (USB), 8 x 8 mm2 image area
Dynamic range: 14 bit, AD conversion
Light coupling: SMA fiber coupling
Wavelength calibration: with mercury lamp