Research Facility

Cluster type MOCVD system 2

   Inductively Coupled Plasma Reactive Ion Etching ( ICP-RIE) 

Metalorganic Chemical Vapor Deposition (MOCVD)

E-beam evaporator (Model : 16KVS014)

Hot-wall CVD

Cluster type MOCVD system

Baking system

Glove box

Gas sensor platform

Raman spectroscopy

TurboMolecular Pump(TMP) evaluation platform

Scanning Mobility Particle Sizer (SMPS)

Time of Flight Mass Spectrometer(TOF-MS)

Hitachi-S4800 (SEM)

ZEISS (SEM)

Tensile compression tester for pressure sensor test