Particle Technology

Particle Technology

Fine particles to People & Environment

Recently, the increases in concentration of fine dust (PM-10, PM-2.5, even lower) can threaten

human inspiratory. To understand and reduce the atmospheric aerosols,

characterization particle size and composition is essential.

Effect of Contaminant Particles in Semiconductor Production Yields

As high density integration processes are required for semiconductor fabrication,

the yields are quite sensitive to contaminant particle size.

The analyses of particle properties, such as size and component, are required to fully

understand the origins and treating methods of contamination.

Development of Particle Characteristics Diagnosis System

Ex-situ analysis (Electron microscope; TEM, SEM)

- Pros : Precisely analyze particle information / Cons : Difficulty in treat rapidly

Particle Characteristics Diagnosis System (PCDS)

- Consists of PBMS, SEM, and EDS for particle size distribution, shape, and composition analysis

- Gain particle size distribution in real-time for rapid treatment on process errors