eNJ-Eco
Frame Structure: rack type
This equipment utilizes advanced printing technology to achieve high-resolution and high-precision patterning beyond the limitations of conventional industrial printing systems.
It enables precise material deposition and pattern formation for research on next-generation printing processes and advanced micro-/nano-fabrication techniques.
Mask Aligner & Exposure SystemÂ
The Mask Aligner & Exposure System enables precise photolithographic pattern transfer through accurate mask alignment and controlled UV exposure.
It is widely used for microfabrication processes such as photoresist patterning and microstructure fabrication in semiconductor and MEMS device research.
RTA, Rapid Thermal Annealing
Optical Microscope
Station
Spin Coater