EQUIPMENT

Probe station

(Temperature & Pressure control)

NBTI/PBTI 신뢰성 분석

Trap density evaluation

Probe station

NBTI/PBTI 신뢰성 분석

Trap density evaluation

DC-sputter

Metal thin film deposition

ALD 1

Metal-Oxide Thin film deposition

RF-sputter

Oxide thin film deposition

RTP 1

Rapid Thermal Annealing

LPCVD

Poly-Si, SiO2 Deposition

PECVD

Si3N4, SiO2 Deposition

PHOTO ROOM

Photo-Lithography

ELLIPSOMETER

Oxide film thickness measurement

ICP-RIE

Metal & Oxide film dry etch

RTP 2

Rapid Thermal Annealing