Embedded Files
Probe station
Probe station
(Temperature & Pressure control)
NBTI/PBTI 신뢰성 분석
Trap density evaluation
Probe station
Probe station
NBTI/PBTI 신뢰성 분석
Trap density evaluation
DC-sputter
DC-sputter
Metal thin film deposition
ALD 1
ALD 1
Metal-Oxide Thin film deposition
RF-sputter
RF-sputter
Oxide thin film deposition
RTP 1
RTP 1
Rapid Thermal Annealing
LPCVD
LPCVD
Poly-Si, SiO2 Deposition
PECVD
PECVD
Si3N4, SiO2 Deposition
PHOTO ROOM
PHOTO ROOM
Photo-Lithography
ELLIPSOMETER
ELLIPSOMETER
Oxide film thickness measurement
ICP-RIE
ICP-RIE
Metal & Oxide film dry etch
RTP 2
RTP 2
Rapid Thermal Annealing
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