“If you want to find the secrets of the universe, think in terms of energy, frequency, and vibration.” ― Nikola Tesla
Piezoelectric MEMS Resonators
Piezoelectric device is one of the most important building block in electronic systems to provide the important function of frequency selection (as a filter) and signal generation (as an oscillator). Thanks to the recent advances in microfabrication technology, miniaturized piezoelectric MEMS devices can be operated at very high frequencies (from VHF to SHF) with low-loss and high electromechanical coupling factors.
Capacitive MEMS Resonators
Similar to the piezoelectric MEMS resonators, the capacitive MEMS resonator with high-Q factors is a proven technology for low-power timing device and high-resolution sensor solutions. Due to the little mass offered by the resonator, such a resonator can be a core technology for next-generation inertial and environmental sensing units.
interface circuits for MEMS
Low power and low noise interface circuits are essential for MEMS devices to amplify the weak output signal from the sensors. By properly construct the precision equivalent circuit model of the MEMS device, MEMS-circuit co-optimization can be accomplished in commercially available CAD tools.
micro mechanics
Understanding the micro mechanics is of great importance for MEMS resonator and sensor designs. We attempt to study the micro mechanics with both theoretical and experimental methods. Topics include the investigation of mechanical, electrical, and thermal nonlinearities, temperature-frequency effects, and wave propagation problems.
