Research
Plasma-Material Interaction
Exploration of Plasma-Materials Interaction in Semiconductor Manufacturing via Computational Methods
Multiscale simulations of the processing surface from atomistic to macroscopic feature scales
Evaluation of functional characteristics of plasma-treated surface
Development of a virtual process platform for semiconductor materials and processes
Noble Scale-bridging Method
Machine Learning-Enhanced Computational Modeling
Seamless scale-bridging using a reduced order modeling for plasma physics using deep learning
Systematic multiscale modeling enhanced by data-driven approaches
Development of machine learning interatomic potential for reactions on solid surfaces
Computational Mechanics
Advanced Computational Mechanics for Materials Engineering
Multiscale analysis of polymeric materials through molecular dynamics, coarse-grained simulations, and continuum mechanics
Investigative insights into the interface and interphase of diverse nanomaterials
Analysis of plastic deformation, viscoelastic properties, and tribological behaviors