Moments

2026.04.05 - 04.10 @ Osaka Univ. + ISM 

Host: Prof. Satoshi Hamaguchi and Prof. Stephen Wu

📌 Invited Seminars
Prof. Kim at Osaka Univ. "Multiscale Computational Approaches for Thin Film Deposition Processes: From Atomistic Surface Reactions to Pattern-Scale Evolution in ALD and MOCVD"
Prof. Kim at ISM Tokyo "Multiscale Simulation Approach for Polymer System: From Atomistic Modeling to Scale-bridging with Data-driven Approach"

📌 VDLab Presentations
영민, "An Automated Framework for Multiscale Simulation of Ion Transport in HAR Etching"
바울, "XAI-LLM Framework for Interpretable Plasma Etching Process Development"

2026.02.04 - 02.06 @ VDLab Seminar room

"Integrated Virtual-Physical AI for Ultra-Precision Manufacturing of Advanced Semiconductor Devices"

📌 Seminars
Prof. Satoshi Hamaguchi, "Atomic-Scale Analyses of Plasma-Surface Interactions"
Prof. Stephen Wu, "LLM-based Agentic AI Applications in Science and Engineering"

📌 VDLab Presentations
바울, "XAI-Guided Discovery of Low-Temperature Plasma Etching"
영민, "Multi-scale Simulations Automation with Agentic AI"

2025.12.05 @ VDLab Seminar room

Wrapping up 2025 with the best team in our favorite new spot!
Proud of how much VDLab has grown this year. Here’s to incubating even bigger dreams next year!

2025.11.11 -  11.14 @ Matsuyama, Ehime, Japan

Invited lecture at the 1st Dry Process School
"TCAD and data-scientific approach to semiconductor processing"

영민 Oral presentation
"Atomistic Insights into Plasma-Material Interactions: Ion Bombardment Driven Crystallization and Pressure Dependent Radical Transportation"

2025.10.13 -  10.17 @ 서울 코엑스

Workshop organizer for
"Combining Plasma Modeling and Artificial Intelligence"

영민 Oral presentation
"Atomistic insights into plasma-material interactions in Al-doped TiO₂ via Molecular Dynamics"

태민 Poster
"A Study on the Low-Temperature Etching Mechanism of  SiO2-SiN-SiO2 Structure Layer Components Using NF3/H2 Plasma"

바울 Poster
"Machine Learning-based Etch Rate Prediction Model in Plasma Dielectric Etching"

도훈 Poster
"A physics-based simulation framework for ion transport and surface interaction analysis in high-aspect ratio etching"