Facility

Computing Node:

Intel® Xeon® Platinum 8558 Processor
(260M Cache, 2.10 GHz, 330W) 48Core X 16

NVIDIA RTX 4090 X 4

NVIDIA RTX 6000 Ada Generation D6 48GB X 4
(NVIDIA Academic Grant Program)

Wafer: 12 inch
Gas: N2, H2, HBr, C4F8, Cl2, SF6, CH2F2, CF4, CHF3, Ar, NF3, O2, PF5, C4H2F6, C2FCl3