Atomic Layer Deposition of Aluminum Oxide in Silicon Wafers
Nameer Sadik, Carlos García Pérez, Melanie Segura Guerrero, Nikhil Joseph, and Jinfeng Wu
Advisors: Dr. Samira Bagheri (EMD Electronics)
Atomic Layer Deposition of Aluminum Oxide in Silicon Wafers
Nameer Sadik, Carlos García Pérez, Melanie Segura Guerrero, Nikhil Joseph, and Jinfeng Wu
Advisors: Dr. Samira Bagheri (EMD Electronics)
This project focuses on the Aluminum Oxide deposition on Silicon oxide wafer for thin film semiconductors to meet the growing need of small semiconductors required for modern computers. Atomic Layer Deposition's (ALD) control surface reactor increases the purity of the wafers and helps as a way to combat the limits set by Moor's Law. This project ALD chamber is specifically design to make the process safer and more environmentally friendly.