Integrated Processing

INESC MN can provide integrated processing of films and devices by combining the technologies and equipment listed above into a customized or semi-customized service. This service is designed in close consultation with INESC MN personnel. Below are listed examples of such integrated services:

Photolithographic patterning:

This service includes consultation and design of the mask(s) to used for the patterning, conversion of the mask to GDS2 format, test exposure of the pattern on photoresist and final exposure of the pattern on substrate of choice. Pattern transfer by etching of the underlying film can also be made within this service.

Magnetic Sensor Prototyping:

Fabrication of field, position, current sensors, read head prototyping and MRAM prototyping. For details of the processes, contact Paulo Freitas.