Cleanroom Rules
Reservation Link (access to Login after training)
BioLab
Bioneer Lab
Characterization Room
Cleanroom Class 10/100/10000
Alcatel
Heidelberg Instruments DWLii direct write laser lithography system - 6" wafers
LAM Research Rainbow Plasma Etcher - reactive ion etching - 6" wafers
Oxford PECVD - 8" wafers
RAITH 150 electron beam lithography system - 6" wafers
SPTS - 8" wafers
Demonstrators Room
3D Printer
Milling Room
Soft Lithography Lab
Meeting Room
Safety Training
Templates
Photo uploads
Photomask Archive
WIKI INESC MN