Welcome to the homepage for Professor Clifford L. Henderson's research group in the School of Chemical and Biomolecular Engineering at the Georgia Institute of Technology. Our research focus broadly lies at the intersection of chemical, chemistry, materials science, and electrical engineering, where in many cases the general goal of our work is to develop materials and processes that allow for high definition patterning of materials and to use these materials and processes to fabricate novel devices and new micro and nanostructured materials. This work leads to projects that intersect a variety of topics including polymer science, thin film science and technology, organic chemistry, nanoscience & nanotechnology, nanomanufacturing, molecular modeling and molecular dynamics, and electronic and optical materials and devices. The materials and processes developed through our work are applied towards the fabrication of everything from structured materials (e.g. phase separated block copolymers) to silicon and graphene based devices and integrated circuits to polymeric scaffolds for tissue engineering. In virtually all of our work we address our problems through a combination of detailed experimental and modeling/simulation approaches.
Examples of current projects include: (1) design of new block copolymers and processes for the directed self assembly (DSA) and fabrication of nanostructures, (2) modeling and simulation of block copolymer phase separation using advanced and novel molecular dynamics, (3) design of new photoresist materials and processes for sub-20nm patterning, (4) studies of the physicochemical property behavior of polymer ultra-thin films, and (5) directed synthesis of graphene. We invite you to explore our work further.
Micro/Nano Lithography News
Henderson Group Wins Best Paper Award At Sematech 2011 International Symposium on Litho Extensions
Professor Henderson and his group were awarded the best paper award at the recent Sematech sponsored 2011 International Symposium on Lithography Extensions for their paper entitled "Understanding the Fundamentals of ...
Posted Apr 16, 2012, 11:33 PM by Cliff Henderson
Henderson Group Wins 2011 SPIE Jeffrey Byers Best Paper Award
The Henderson group was recently awarded the 2011 SPIE Jeffrey Byers best paper award for their paper entitled "Design, Synthesis, and Characterization of Directly Photo-definable Guiding Layers for Directed ...
Posted Apr 16, 2012, 11:35 PM by Cliff Henderson
Professor Henderson Receives Intel Outstanding Researcher Award
Professor Henderson was recently awarded an Intel Outstanding Researcher Award for his group's work on understanding pattern collapse in photoresist nanostructures and for developing processes to help mitigate such ...
Posted Apr 18, 2012, 7:15 PM by Cliff Henderson
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