Resume

BENJAMIN W. CHUI,  Ph.D.


WORK EXPERIENCE

2/05-present
MEMS and Nanotechnology Engineering Consultant

· Consulting for academic and industry clients on design, layout, process development, prototype fabrication, and transfer-to-manufacturing of MEMS devices.  Scope of work includes micro-sensors, customized AFM cantilever tips, bio-application needles, micro-fluidic devices, optical gratings, optical devices and circuit design; also includes technology review, background research and feasibility analysis.

3/04-12/04
Scientific Collaborator, University of Neuchatel, Switzerland

· Worked on the design and fabrication of liquid-compatible atomic force microscope (AFM) probe arrays for life-science applications. Successfully fabricated and tested 2D array of thin piezoresistive cantilevers and established standard process flow for such devices.

9/02-3/04
Visiting Scientist, Nanoscale Studies Dept, IBM Almaden Research Center, San Jose, California

· Worked with Dan Rugar's group on the use of magnetic resonance force microscopy (MRFM) for spin detection.  Focused on design and fabrication of custom mass-loaded cantilevers for ultra-sensitive force detection.  Cantilevers successfully used in the detection of single electron spins (Nature, July 2004; #1 AIP physics story of 2004).

2/99-7/02
Senior Design Engineer, Lightconnect Inc., Newark, California

· As employee #2, helped company grow from 2 to 60 people in three years. Fabricated prototype diffractive-MEMS chips used in company products (including variable optical attenuator and dynamic gain equalizer). Supervised transfer of technology to commercial foundry; worked with foundry to implement process development and yield improvements.

· Worked in Stanford Nanofabrication Facility performing wafer processing tasks, including lithography, thin film deposition, etching, metallization.


EDUCATION

1/95-6/98

· Ph.D. in Electrical Engineering, Stanford University, June 1998.
Performed research on Atomic Force Microscope thermomechanical data storage under Prof. Thomas Kenny, in collaboration IBM Almaden Research Center.

· Specialized in micro-electro-mechanical system (MEMS) design and fabrication.

· Thesis: “Advanced micromachined cantilevers for AFM data storage and imaging.”

· Recipient of IBM Cooperative Graduate Fellowship, 1995-1998.

9/88-6/92

· M.S. and B.S. in electrical engineering, Stanford University, 1992 (GPA 4.0)

· Specialized in semiconductor device technology and VLSI design.

· Participated in six-month Stanford-in-Japan overseas program, 1991.

9/81-6/88

· Diocesan Boys’ School, Hong Kong (A-levels 1988, HKCEE 1986)

 

ACADEMIC AWARDS

· Henry Ford II Scholar Award, 1992 (highest GPA in Stanford School of Engineering)

· Terman Engineering Award, 1991 (top 5% in engineering school)

· Member, Tau Beta Pi and Phi Beta Kappa

· Sir Edward Youde Memorial Scholarship for Overseas studies, Hong Kong, 1988

· Top 10 students out of 160,000 in Hong Kong high school graduation exam, 1986

 

RESEARCH EXPERIENCE

· Designed and fabricated mass-loaded single-crystal silicon cantilevers with specially engineered thermal noise spectra for ultra-sensitive force detection in magnetic resonance force imaging.

· Designed, fabricated and tested novel dual-axis AFM cantilever with independent piezoresistive sensors for vertical and lateral force detection. Invented oblique ion implant technique for high-aspect-ratio microstructures (3 patents issued).

· Designed and built electronic servo controller for AFM data disk tracking and readback, using dual-axis piezoresistive cantilever mounted on modified compact-disk actuator.

· Designed, fabricated and tested 1-micron thick silicon cantilevers with integrated piezoresistors for atomic force microscope (AFM) data readback and resistive heaters for thermal writing.

· Developed ion implant and anneal process for making shallow piezoresistors on thin substrates, producing low-stiffness, high-sensitivity cantilevers.

· Optimized heater-cantilever design using ANSYS simulations, enabling the fabrication of micromachined heaters with 300-fold improvement in thermal response time.

· Gained extensive clean room experience, especially in silicon micromachining: photolithography, plasma etching, furnace oxidation, rapid thermal anneal, wet silicon etching, polyimide-film application, metal etching, deep Si etching.

· Languages: English, Chinese, elementary French and Japanese.  Interests: piano, tennis.


 

PUBLICATIONS AND PRESENTATIONS

Book:

· "Microcantilevers for atomic force microscope data storage," S.D. Senturia, ed., Kluwer Academic Publ., 168 pages.

Book chapter (primary author):

· "Dual-axis piezoresistive AFM cantilever for independent detection of vertical and lateral forces," in Tribology Issues and Opportunities in MEMS, Kluwer Academic Publishers, Apr. 98.

MRFM-related papers:

· "Single spin detection by magnetic resonance force microscopy," D. Rugar, R. Budakian, H.J. Mamin, B.W. Chui, Nature, Vol. 430, pp. 329-332, July 2004.

· "Detection and manipulation of statistical polarization in small spin ensembles," H.J. Mamin, R. Budakian, B.W. Chui, D. Rugar, Phys. Rev. Lett., Vol. 91, 207604, 2003.

· "Manipulation and Detection of Electron Spins by Magnetic Resonance Force Microscopy," D. Rugar, R. Budakian, H.J. Mamin, B.W. Chui, AIP Conf. Proc. 696, 45, 2003.

Other journal publications (primary author):

· "Advanced temperature compensation for piezoresistive sensors based on crystallographic orientation," Rev. Sci. Instr., Vol. 78, No. 4, 2007.

· "Independent piezoresistive detection of vertical and lateral forces with a dual-axis atomic force microscope cantilever," Appl. Phys. Lett., Vol. 72, pp. 1388-90, 1998.

· "Low-stiffness silicon cantilevers with integrated piezoresistive sensors and resistive heaters for high-density AFM thermomechanical data storage," J. MEMS, Vol. 7, pp. 69-78, 1998.

· "Low-stiffness silicon cantilevers for thermal writing and piezoresistive readback with the atomic force microscope" Appl. Phys. Lett., vol. 69, pp. 2767-9, 1998.

Conference presentations and papers (primary author):

· "Mass-loaded cantilevers with suppressed higher-order modes for magnetic resonance force microscopy," proceedings of Transducers ‘03, pp. 1120-3, Boston, Aug. 2003.

· "Modeling of heat transfer and design optimization for high-speed heater-cantilever," poster, Transducers ‘01, Sendai, June 1999.

· "A novel approach to the design and fabrication of dual-axis high-aspect-ratio piezoresistive MEMS structures," poster, 7th Solid-state Sensor & Actuator Workshop, Hilton Head, June 1998.

· "Dual-axis piezoresistive cantilever for simultaneous detection of lateral and vertical forces," proceedings of MEMS 98, Heidelberg, Jan. 1998.

· "A novel piezoresistive AFM cantilever for simultaneous detection of lateral and vertical forces," proceedings of the ASME International Congress and Exposition, Dallas, Nov. 1997

· "Independent detection of lateral and vertical forces with a novel AFM piezoresistive cantilever," presented at the American Vacuum Society (AVS) 44th Annual Symposium, San Jose, Oct. 1997.

· "Micromachined heaters with 1-ms thermal time constants for AFM thermomechanical data storage," proceedings of Transducers ‘97, Chicago, June 1997.

· "Advanced cantilevers for AFM thermomechanical data storage," presented at the American Vacuum Society 43rd Annual Symposium, Philadelphia, Oct. 1996.

· "Improved cantilevers for AFM thermomechanical data storage," proceedings of 6th Solid-state Sensor and Actuator Workshop, Hilton Head, June 1996.


Updated July 2011

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