Read/write cantilevers for nano-scale AFM data storage

Designed, fabricated and tested 1-micron-thick silicon cantilevers with integrated piezoresistive sensors (for bit sensing); or with integrated heaters (for bit writing on a plastic substrate) in Stanford/IBM collaboration. Invented dual-axis cantilevers for orthogonal sensing. Devices were precursors to "Millipede" probe-array-based mass storage project at IBM Zurich.

Micro-grating devices for fiber-optic networks

As employee #2 in Lightconnect, Inc., played major role in development of optical MEMS devices for fiber-optic networks. Performed design, layout and hands-on fabrication of prototype chips. Acted as liaison with commercial foundry. Helped company grow from 2 to 60 employees in three years. Company (now part of Neophotonics Inc.) is now a well-established provider of dynamic optical components such as MEMS-based variable optical attenuators and dynamic channel equalizers. (Image courtesy of Lightconnect, Inc.)

Custom thin cantilevers for MRFM

Fabricated mass-loaded, 100-nm thick single-crystal silicon cantilevers for magnetic resonance force microscopy (MRFM) experiment (Dan Rugar’s group, IBM Almaden Research Center). Cantilevers used in detection of single electron spins (Nature, July 2004).

Technical illustration and animation

Produced POV-RAYTM-based scientific animation clip for IBM’s MRFM experiment (click here to download 25MB mpeg movie from IBM's website--may take a few minutes).

Piezoresistive levers for biotech applications

Led process-development and fabrication efforts on piezoresistive cantilevers for biological applications at Institute of Microtechnology, Neuchatel, Switzerland. Introduced process flow that successfully produced functional device prototypes on first run.

Other projects

Information on other projects are available upon request.