About Ben Chui

Brief biography

Ben Chui graduated from Stanford University in 1998 with a Ph.D. degree in electrical engineering.  His thesis research ("Advanced Microcantilevers for Atomic Force Microscope Data Storage")  (Part 1, Part 2) was carried out under the supervision of Stanford Professor Thomas W. Kenny in collaboration with IBM Almaden Research Center.

Dr. Chui has subsequently worked in various settings including an optical MEMS startup company (Lightconnect, Inc., now part of Neophotonics, Inc.), a corporate research lab (IBM Almaden Research Center), and a university research center (Institute of Microtechnology, Neuchatel, Switzerland).    He has particular experience in the development of atomic force microscope (AFM) cantilevers.

In addition, Dr. Chui has accumulated extensive processing experience at the Stanford Nanofabrication Facility (SNF), which houses a wide variety of semiconductor equipment for the fabrication of R&D MEMS devices.

Dr. Chui has published one book and numerous papers on MEMS-related subjects, especially in connection with AFM cantilevers and piezoresistive devices. For a complete list, please refer to his resume.

Areas of expertise

·          MEMS device design and layout

·          Process development for new designs

·          Hands-on fabrication of prototype devices

·          Device testing and optimization

·          Liaison with external foundries for transfer to manufacturing

·          Scientific/engineering illustration and animation

Detailed resume

Please click here for a detailed resume.