Partners

The Southampton Nanofabrication Centre

University of Southampton, UK

The Southampton Nanofabrication Centre is a state-of-the-art facility for microfabrication, high-spec nanofabrication and characterisation. Combining traditional and novel top-down fabrication with advanced bottom-up fabrication enables the development and production of a wide range of devices in diverse fields such as electronics, nanotechnology and bionanotechnology, and incorporation into an equally comprehensive array of nano and microsystems for analysis and use. The characterisation capability is a similarly extensive catalogue of microscopes and test gear, from nanometre resolution scanning microscopes to electrical, magnetic and RF analysis.

Network Role: The Southampton Nanofabrication Centre (SNC) team plays a key role in PicoFIB in the exploration of the frontiers of ion patterning. The He-FIB at the SNC is augmented with a Xenos XeDraw2 external pattern generator. The instrument is housed in a cleanroom along with a large range of complementary fabrication and characterisation tools that will be useful to the network, including XPS, electron beam lithography (EBL) and gallium focused ion beam (FIB) with FIB- SIMS capability. PicoFIB activities will enhance the SNC research activities in soft matter and device patterning.

Dr Stuart Boden

Associate Professor

Silicon photovoltaics and focused helium ion beam nanofabrication

Phone: +44 23 8059 3278

Email: sb1@ecs.soton.ac.uk