奈米及薄膜製程實驗室

Laboratory of nanotechnology and
thinfilm process

主持人: 黃智賢教授

hosted by professor Jih-Shang Hwang

海洋大學綜合二館101R

Lab Tel: 02-24622192 ext 6716

WELCOME

本實驗室位於海大綜合二館1F,是一間專注於半導體或光電材料的奈米與薄膜製程技術開發的實驗室。本實驗室過去的研究包括:

1.各式半導體的奈米製程與應用

2.表面增強拉曼基板設計與實驗

3.奈米材料的場發射性質量測

4.矽奈米線太陽能電池的研發

5.無毒矽太陽能電池製程開發

6.以拉曼光譜計算石墨烯堆疊方式與層數

7.新一代太陽能電池開發

8.常壓電漿噴束成長半導體與發光二極體

9.各種儀器量測系統的自行設計程式控制整合(太陽能IV曲線、太陽能EQE、場發射量測系統、LBIC、MOCVD控制系統、Hall effect、ALD控制系統...)

本實驗室自有豐富的研究資源包括: 電子顯微鏡(SEM)、原子力顯微鏡(AFM)、太陽能電池量測系統、場發射量測系統、RF/DC濺鍍機、鍍金機、高溫爐管、蒸鍍機、高週波加熱機、光學顯微鏡、常壓電漿噴束系統等。以上許多設備都是半導體光電業界常用到的機台,本實驗室學生也因此很多都可以在畢業後直接進入半導體或光電產業,成為高科技工程師。目前實驗室畢業學生自1993年起統計至2020/8月已達79人,分布於半導體、記憶體、太陽能電池、發光二極體、電子、顯示器、筆記型電腦等產業,包括台積電、晶電、友達、鴻海、聯合再生能源、應用材料、仁寶、廣達等公司。

本實驗室主持人,研究領域廣泛(低溫物理、儀器控制、光電半導體奈米製程技術)、個性和善、樂於助人,熱心教育與研究。他用心教導學生,不僅開設相關課程提供學生基礎的奈米製程知識,也會在Meeting訓練同學以英語報告期刊論文與進度,並訓練同學發問、協助解答,也會在研究過程中,不厭其煩地跟著同學一起嘗試找到有意義的研究方向,讓學生能體會到研究的意義。

最後,若對本實驗室研究的方向有興趣,不論是什麼科系與背景,只要有心想跨入半導體、光電與材料領域知識,都歡迎與本實驗室主持人email聯繫談談。

In English

This laboratory is located on the 1st floor of General Purpose Buiding 2 in the campus of National Taiwan Ocean University. It is a laboratory focusing on the development of nanotechnology and thin film process techniques for semiconductor and optoelectronic materials. Past research in this laboratory includes:

1. Nanomanufacturing and applications of various semiconductors

2. Design of surface enhanced Raman substrate

3. Field emission measurement of nanomaterials

4. Research and development of silicon nanowire solar cells

5. Development of non-toxic silicon solar cell manufacturing process

6. Calculate the stacking mode and number of layers of graphene by Raman spectroscopy

7. Development of next generation solar cells

8. Design of atmospheric pressure plasma jet to grow semiconductors and light-emitting diodes

9. Programing for control and integration of various instrument measurement systems (solar IV curve, solar EQE, field emission measurement system, LBIC, MOCVD control system, Hall effect, ALD control system...)

The laboratory’s facilities include: electron microscope (SEM), atomic force microscope (AFM), solar cell measurement system, field emission measurement system, RF/DC sputtering machine, gold sputtering machine, high temperature furnace, thermal evaporator, high frequency induction heating machine, optical microscope, atmospheric pressure plasma jet system, etc. Many of the above facilities are commonly used in the semiconductor/optoelectronics industries, so most students in this laboratory can directly enter the semiconductor or optoelectronics industry and become high-tech engineers after their graduation. At present, the number of graduated students from the laboratory has reached 79 from 1993 to August 2020. They are distributed in companies fabricating ICs, memories, solar cells, light-emitting diodes, electronics, displays, and notebook computers. The companies including TSMC, Epistar , AUO, Foxiconn, United Renewable Energy, Applied Materials, Compal, Quanta and other companies.

Jih-Shang Hwang, as the host of this laboratory, has a wide range of interest research fields (low-temperature physics, instrument control, opto-semiconductor nano-manufacturing technology). He is a kind person. He likes to help others, with an enthusiasm for education and research. He teaches students attentively. Not only does he offer relevant courses to provide students with basic knowledge of nanotechnology, but he also trains students to report journal papers and progress in English at their group meeting. Further, he encourages his students to ask questions; and he is always willing to answer any question too. During the research process, he will try hard to find a meaningful research direction with his students, so that students can appreciate the significance of research.

Finally, if you are interested in the research direction of this laboratory, regardless of the department and background, as long as you are willing to work hard for your future, you are welcome to contact Prof. Jih-Shang Hwang by emailing to: hjsspin@mail.ntou.edu.tw.


學習研究歷程(Learning Journey)

課程研討
(Study in class)

一年級時,老師會開設並指導同學修習適合個人的研究所課程,並訓練讀專業論文以英語報告能力。老師在報告後,除專業問題外,也會對同學報告內容與問題給予建議。

技術學習
(Learning in lab)

開學前暑假會有實驗室的訓練課程,讓同學了解每個儀器的運作與注意事項。碩一時,先從學長那裏學習基本的實驗技術,慢慢培養獨立實驗的能力。實驗室Meeting時,除訓練以英語報告外,也訓練每個同學參與對報告者發問,老師會從旁解答較困難的問題。此外,實驗室也與中研院陳貴賢教授與台大凝態中心有長期的合作交流。

實驗研究
(Research via experiments)

碩二起,開始研究與實驗,將訓練同學在實驗室Meeting以英語報告進度。實驗上,有任何問題皆可隨時向老師報告,以迅速調整研究方向與策略。如此,最終不僅能找到有意義的研究題目,也學習到做研究的方法。

相片集錦(Photo Gallery)