Development and fabrication of electrostatic, electromagnetic, and electrothermal micro/nano actuators.
Design and fabrication of micro/nano fluidic sensors and accelerometers.
Development of optical application components, including micro/nano lenses, optical switches, optical converters, fiber-optic connectors, and optical waveguides.
Integrated application of micro/nano fabrication technologies, including photolithography, etching, electroforming, molding, sacrificial layer processes, and related techniques.
Development of packaging technologies, including anodic bonding, adhesive bonding, and wafer-level packaging.