Microsystem Packaging Laboratory
在微系統封裝實驗室中,可以進行晶片接合、玻璃-晶片接合、高分子接合等製程。
In the Microsystem Packaging Laboratory, chip bonding, glass-to-chip bonding, polymer bonding, and other bonding processes can be performed.
Photolithography Laboratory
在黃光製程實驗室中,所使用的光阻有JSR-430N、SU-8,及AZ系列等光阻。
In the photolithography laboratory, the photoresists used include JSR-430N, SU-8, and AZ series photoresists.
Chemical Process Laboratory
在化學製程實驗室中,可以進行電鑄、化學蝕刻及體型矽微加工等製程。
In the Chemical Processing Laboratory, electroforming, chemical etching, and bulk silicon micromachining processes can be performed.