Keywords: optomechanics, nanoelectromechanical systems, nonlinear circuits, microwave engineering, quantum engineering

Microwave optomechanical device

Microwave optomechanical circuit, composed of LC microwave resonator capacitively coupled with a nano-mechanical oscillator, allows to probe, detect and manipulate mechanical phonons through microwave photons. Such a kind of device can serve for quantum engineering and classical sensors. 

Recent progress

• Implementation of reservoir computing using coupled microelectromechanical drum resonatorsvia sideband-pumped phonon–cavity dynamics, Microsystems & Nanoengineering (2026) 12, Article number: 163 link for download, and also https://arxiv.org/abs/2601.02617

• Imaging Nanomechanical Vibrations and Manipulating Parametric Mode Coupling via Scanning Microwave Microscopy, Nano Letters (2024) 24, 28, 8550-8557 https://arxiv.org/abs/2407.00239

• Effects of stochastic forces on the nonlinear behaviour of a silicon nitride membrane nanoelectromechanical resonator, Nanotechnology (2023),  34, 215202, arXiv.2212.11218 

• Coupling Capacitively Distinct Mechanical Resonators for Room-Temperature Phonon-Cavity Electromechanics, Nano Letters (2022),  22, 18, 7351–7357,  arxiv.org/abs/2204.04641 

• High-Q silicon nitride drum resonators strongly coupled to gates, arXiv preprint arxiv.org/abs/2104.07142 , Nano Letters (2021) 21 (13), 5738-5744

• Electric circuit model of microwave optomechanics, Journal of Applied Physics (2021) 129, 114502 arxiv:2007.14438

• Beyond linear coupling in microwave optomechanics, Phys. Rev. Research (2020) 2, 033480  arxiv:2003.03176

• Brute-force cooling and on-chip thermometry for microwave optomechanics, Phys. Rev. Applied (2019)12, 044066, arXiv:1903.04992

Other interests

•  3D microwave cavity coupling with nanomechanical oscillator 

• Novel NEMS structure, e.g. Drum 

• Numerical simulation and analytical calculation of optomechanical circuits