e.g. Silicon nitride drum electromechanical resonator. 

e.g. 3D microwave cavity coupled to mechanical oscillator 

Keywords: optomechanics, nanoelectromechanical systems, nonlinear circuits, microwave engineering, quantum engineering

Microwave optomechanical device

Microwave optomechanical circuit, composed of LC microwave resonator capacitively coupled with a nano-mechanical oscillator, allows to probe, detect and manipulate mechanical phonons through microwave photons. Such a kind of device can serve for quantum engineering and classical sensors. 

Very recent progress

Other interests