e.g. Silicon nitride drum electromechanical resonator.
e.g. 3D microwave cavity coupled to mechanical oscillator
Keywords: optomechanics, nanoelectromechanical systems, nonlinear circuits, microwave engineering, quantum engineering
Microwave optomechanical device
Microwave optomechanical circuit, composed of LC microwave resonator capacitively coupled with a nano-mechanical oscillator, allows to probe, detect and manipulate mechanical phonons through microwave photons. Such a kind of device can serve for quantum engineering and classical sensors.
Very recent progress
Effects of stochastic forces on the nonlinear behaviour of a silicon nitride membrane nanoelectromechanical resonator, Nanotechnology (2023), https://iopscience.iop.org/article/10.1088/1361-6528/acbeb0
Coupling Capacitively Distinct Mechanical Resonators for Room-Temperature Phonon-Cavity Electromechanics, Nano Lett. (2022), 22, 18, 7351–7357, arxiv.org/abs/2204.04641
High-Q silicon nitride drum resonators strongly coupled to gates, arXiv preprint arxiv.org/abs/2104.07142 , also Nano Lett. 21 (13), 5738-5744 (2021)
Electric circuit model of microwave optomechanics,Journal of Applied Physics 129, 114502 (2021) arXiv preprint arxiv:2007.14438
Beyond linear coupling in microwave optomechanics, arXiv preprint arxiv:2003.03176
Geometrical Nonlinearity of Circular Plates and Membranes, arXiv preprint arXiv:1910.02852
Brute-force cooling and on-chip thermometry for microwave optomechanics, arXiv preprint arXiv:1903.04992 , also Phys. Rev. Applied 12, 044066 (2019)
Other interests
3D microwave cavity coupling with nanomechanical oscillator
Novel NEMS structure, e.g. Drum
Numerical simulation and analytical calculation of optomechanical circuits