Conferences

Daehan Won, Harin Song, Hongju Yang, Hojin Chung, Won-Yong Choi, and In-Hwan Baek, "Plasma-enhanced atomic layer etching of nano-scale cobalt interconnect line using organic gases", ICAMD 2025, BEXCO, December 8-12 (2025), Poster

Hongju Yang, Jaemin Jung, In-Hwan Baek, and Chee Won Chung, "Effect of oxygen concentration on the high density plasma reactive ion etching of molybdenum thin films in halogen/O2/Ar gas mixture", ICAMD 2025, BEXCO, December 8-12 (2025), Poster

Sang Beom Seo, Inhong Hwang, Yoohyeon Jung, Jaemin Jung, Won Yong Choi, Dahui Jeon and In-Hwan Baek, "SnO2 seed layer assisted Low-Temperature Atomic Layer Deposition of high-k rutile TiO2 for advance DRAM capacitor", IEEE/IEIE ICCE-Asia 2025, Westin Josun Busan, October 27-29 (2025), Poster

Jun-Yong Lee, Inhong Hwang, Dahui Jeon and In-Hwan Baek, "Improving Indium Oxide Thin-Film Transistors Performance and Reliability through CF4 and O2 Plasma Treatments", IEEE/IEIE ICCE-Asia 2025, Westin Josun Busan, October 27-29 (2025), Poster

Dahui Jeon, Chee Won Chung and In-Hwan Baek, "Toward Infinite Selectivity: Area-selective Atomic Layer Deposition of Ruthenium Enabled by CFx Plasma Treatment", 2025 International Conference on Solid State Devices and Materials, Yokohama, September 15-18 (2025), Oral

Jaeyoon Shim, Jaemin Jung, Dahui Jeon, Inhong Hwang, Yoohyeon Jung and In-Hwan Baek, “Tunable Scavenging Effects of Al2O3 Passivation via Oxidant Selection for High-Performance Tellurium TFTs", 2025 International Conference on Solid State Devices and Materials, Yokohama, September 15-18 (2025), Poster

Jaemin Jung, Jaeyoon Shim, Dahui Jeon, Taek-Mo Chung, Chee Won Chung and In-Hwan Baek, "Electrical Performance Enhancement of p-Type SnO TFTs via Back-Channel Engineering with Fluorocarbon Plasma Treatment”, 2025 International Conference on Solid State Devices and Materials, Yokohama, September 15-18 (2025), Poster

KwangMin Kim, BoMyung Kang, GaYoung Kim, YeWon Seo, YeoYoung Choi, Dahui Jeon and In-Hwan Baek, "Development of Next-Generation Low-resistivity Interconnect Materials via Atomic Layer Deposition", ITC-CSCC 2025, Chung-Ang University, July 7-10 (2025), Poster

YeoYoung Choi, Dahui Jeon and In-Hwan Baek, "Area-selective Atomic Layer Deposition Assisted by Octadecylphosphonic Acid Self-assembled Monolayers", ITC-CSCC 2025, Chung-Ang University, July 7-10 (2025), Poster

Jun-Yong Lee, Inhong Hwang and In-Hwan Baek, "Performance Enhancement of Indium Oxide Thin-film Transistors via Plasma Treatment", ITC-CSCC 2025, Chung-Ang University, July 7-10 (2025), Poster

Sang Beom Seo, Inhong Hwang and In-Hwan Baek, "Low-Temperature Growth of Rutile TiO2 Using a SnO2 Seed Layer for High-k Dielectric Applications in DRAM Devices", ITC-CSCC 2025, Chung-Ang University, July 7-10 (2025), Poster

Jonghyun Seo, Jiseong Baek, Yunju Jung, Subin Youn, Eun Jo, Jaeyoon Shim and In-Hwan Baek, "Study on Contact Resistance Improvement of Oxide Semiconductor for Monolithic 3D Integration", ITC-CSCC 2025, Chung-Ang University, July 7-10 (2025), Poster

Obin Kwon, Chanseo Kim, Yunha Youn, Jinsol Lee, Jaemin Jung and In-Hwan Baek, "CF4 Plasma Treatment for Hysteresis Reduction in ALD Grown p-Type SnO Thin-Film Transistors", ITC-CSCC 2025, Chung-Ang University, July 7-10 (2025), Poster

Dahui Jeon and In-Hwan Baek, “Advanced Area-selective Atomic Layer Deposition of Ruthenium via Plasma Surface Engineering”, The 23rd International Nano Technology Exhibition, KINTEX, July 2-4 (2025), Poster

InHong Hwang and In-Hwan Baek, “High-Performance 2 nm In2O3 Thin-Film Transistors Fabricated by BEOL-Compatible ALD using DBADMIn Precursors”, The 23rd International Nano Technology Exhibition, KINTEX, July 2-4 (2025), Poster

Jaeyoon Shim, Jaemin Jung and In-Hwan Baek, “Oxidant-Dependent Scavenging Effects in Al2O3 Passivation for High-Performance Tellurium TFTs”, The 23rd International Nano Technology Exhibition, KINTEX, July 2-4 (2025), Poster

YooHyeon Jung, InHong Hwang and In-Hwan Baek, “Enhancing the Stability of Indium Oxide Thin-Film Transistors via ALD-Based Passivation Layer”, The 23rd International Nano Technology Exhibition, KINTEX, July 2-4 (2025), Poster

Jaemin Jung and In-Hwan Baek, “Electrical Performance Enhancement of p-Type SnO TFTs via Back-Channel Engineering with Fluorocarbon Plasma Treatment”, The 23rd International Nano Technology Exhibition, KINTEX, July 2-4 (2025), Poster

Dahui Jeon and In-Hwan Baek, “Area-Selective Atomic Layer Deposition of Ruthenium via Plasma Surface Modification”, AVS 25th International Conference on Atomic Layer Deposition (ALD 2025), ICC Jeju, June 23-25 (2025), Oral

InHong Hwang and In-Hwan Baek, “Development of High-Performance 2 nm In2O3 Thin-Film Transistors via BEOL-Compatible ALD Process Using DBADMIn Precursors”, AVS 25th International Conference on Atomic Layer Deposition (ALD 2025), ICC Jeju, June 23-25 (2025), Poster

Jaeyoon Shim, Jaemin Jung and In-Hwan Baek, “Tailoring the Scavenging Effect of ALD-Al2O3 Passivation Layer via Oxidant Engineering for High-Performance Tellurium Transistors”, AVS 25th International Conference on Atomic Layer Deposition (ALD 2025), ICC Jeju, June 23-25 (2025), Poster

YooHyeon Jung, InHong Hwang and In-Hwan Baek, “Exploring Ultrathin SnO2 Films via Atomic Layer Deposition for Facilitating the Formation of the Rutile TiO2 Phase”, AVS 25th International Conference on Atomic Layer Deposition (ALD 2025), ICC Jeju, June 23-25 (2025), Poster

Jaemin Jung, Jaeyoon Shim and In-Hwan Baek, “High-Performance p-Type SnO Thin Film Transistor with Raised Source/Drain using Dry Etching Method”, AVS 25th International Conference on Atomic Layer Deposition (ALD 2025), ICC Jeju, June 23-25 (2025), Poster

In-Hwan Baek, "ALD-Based Fabrication of High-Quality n/p-Type Oxide Semiconductor Channels for Stackable CMOS System", GCIM 2025, JEJU ICC, June 18 (2025), Oral (Invited)

In-Hwan Baek, Jung Joon Pyeon, Seong Ho Han, Taek-Mo Chung, Jeong Hwan Han, Han Sol Lee, Cheol Seong Hwang, and Seong Keun Kim, “Atomic layer deposition of 2-D SnS thin films and their applications”, 22nd International Conference on Solid State Ionics, Pyeongchang, South Korea, June 16-21 (2019), Poster

In-Hwan Baek, Jung Joon Pyeon, Han Sol Lee, Seong Ho Han, Taek-Mo Chung, Jeong Hwan Han, Cheol Seong Hwang and Seong Keun Kim, “The growth of well-oriented 2-D SnS thin films at low temperatures by atomic layer deposition”, E-MRS Spring 2019, Nice, France, May 26-31 (2019), Poster

In-Hwan Baek, Jung Joon Pyeon, Taek-Mo Chung, Jeong Hwan Han, Cheol Seong Hwang, and Seong Keun Kim, “Atomic layer deposited quaternary InZnSnO thin films for emerging electronic devices”, International Meeting on Information Display, Busan, South Korea, August 28-31 (2018), Oral

In-Hwan Baek, Jung Joon Pyeon, Taek-Mo Chung, Jeong Hwan Han, Cheol Seong Hwang, Seong Keun Kim, “Low-temperature growth of 2-D SnS thin films by atomic layer deposition”, 18th International Conference on Atomic Layer Deposition, Incheon, South Korea, July 29 - August 1 (2018), Oral

In-Hwan Baek, Jung Joon Pyeon, Taek-Mo Chung, Jeong Hwan Han, Cheol Seong Hwang, Seong Keun Kim, “Atomic layer deposition of pure 2-D SnS thin films”, International Meeting on Information Display, Busan, South Korea, August 28-31 (2017), Oral

Dahui Jeon, Tien Anh Nguyen, Sieun Chae and In-Hwan Baek, "Achieving Infinite Selectivity in Area-Selective Atomic Layer Deposition of Ruthenium for BEOL Interconnects", NCC 2026,  광주 곤지암 리조트, February 5-6 (2026), Poster

Jaeyoon Shim, Jaemin Jung, Dahui Jeon and In-Hwan Baek, "Investigating ALD Al2O3 -Induced Interface Optimization through Oxygen Scavenging in p-Type Te TFTs", NCC 2026,  광주 곤지암 리조트, February 5-6 (2026), Poster

Jaemin Jung, Jaeyoon Shim, Dahui Jeon and In-Hwan Baek, "Back-Channel Engineering with Fluorocarbon Plasma Treatment for High-Performance BEOL-Compatible p-Type SnO Thin-Film Transistors", NCC 2026,  광주 곤지암 리조트, February 5-6 (2026), Poster

Dahui Jeon, Tien Anh Nguyen, Sieun Chae and In-Hwan Baek, "Metal-on-Metal Area-Selective Atomic Layer Deposition of Ruthenium with Infinite Selectivity for Advanced BEOL Interconnects", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Oral

Harin Song, Dahui Jeon, Daehan Won, Hong Ju Yang, Chee Won Chung and In-Hwan Baek, "Halogen-free, acetic acid-based plasma atomic layer etching of cobalt enabling redeposition-free anisotropic etching", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Oral

Jaeyoon Shim, Jaemin Jung, Dahui Jeon and In-Hwan Baek, "Scavenging-Driven Interface Engineering for High-Performance Te-Based p-type TFTs via ALD Al2O3 Passivation", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Oral

Jaemin Jung, Jaeyoon Shim, Dahui Jeon, Sung Kwang Lee, Taek-mo Chung and In-Hwan Baek, "Low-Temperature Process Strategies for High-Performance BEOL-Compatible p-Type SnO Thin-Film Transistor", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Oral

Yoohyeon Jung, Dahui Jeon and In-Hwan Baek, "Seed-Layer-Mediated Nucleation for Enhanced Atomic Layer Deposition of Platinum Thin Films", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Poster

Hong Ju Yang, Jaemin Jung, Hojin Jung, In-Hwan Baek and Chee Won Chung, "Influence of Oxygen and HBr on the Etching Characteristics of Molybdenum Thin Films in Cl2/O2/HBr/Ar gas mixture", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Oral

Daehan Won, Harin Song, Hong Ju Yang, Hojin Chung Chee Won Chung and In-Hwan Baek, "Plasma-enhanced atomic layer etching for fine line patterns of next-generation interconnect materials", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Poster

Hojin Jung, Hong Ju Yang, Daehan Won, Harin Song, Chee Won Chung and In-Hwan Baek, "유기가스를 이용한 몰리브덴 박막의 플라즈마 강화 원자층 식각", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Poster

Jun Yong Lee, Inhong Hwang, Dahui Jeon, Changbong Yeon, Jaesun Jung and In-Hwan Baek, "Atomic Layer Deposition of Ga2O3 Using (N,N'-di-tert-butylacetimidamido)dimethylgallium Precursor", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Poster

Sang Beom Seo, Dahui Jeon and In-Hwan Baek, "Enhancement of Electrical Conductivity in Atomic Layer Deposited SnO2 by Fluorine Doping", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Poster

Soobin Bae, Dahui Jeon and In-Hwan Baek, "Analysis of Grain Boundary Scattering and Grain Coarsening for LowResistivity Ru Interconnect", 제 33회 반도체학술대회, 강원도 하이원리조트, January 27-30 (2026), Poster

Jun-Yong Lee, Inhong Hwang, Yoohyeon Jung and In-Hwan Baek, “ALD를 이용한 저온 성장 인듐 산화물 박막 트랜지스터의 전기적 특성 분석”, 2025 반도체공학회 하계종합학술대회, 소노캄 여수, July 13-16 (2025), Poster

Sang Beom Seo, Inhong Hwang, Jaemin Jung, Yoohyeon Jung and In-Hwan Baek, “Epitaxial alignment 기반 저온 rutile 상 TiO2 박막 제조와 DRAM 응용성에 대한 연구”, 2025 반도체공학회 하계종합학술대회, 소노캄 여수, July 13-16 (2025), Poster

Dahui Jeon and In-Hwan Baek, “Area-selective Atomic Layer Deposition of Ruthenium Enabled by Surface Chemistry Control”, 한국반도체디스플레이기술학회 2025 국내학술대회, 명지대학교, May 30 (2025), Oral

Jaeyoon Shim, Jaemin Jung and In-Hwan Baek, “Optimization of Passivation Strategy for High-Performance Tellurium TFTs: Investigating Scavenging Effects”, 한국반도체디스플레이기술학회 2025 국내학술대회, 명지대학교, May 30 (2025), Poster

YooHyeon Jung, InHong Hwang and In-Hwan Baek, “Improving the Stability of Indium Oxide Thin-Film Transistors through Atomic Layer Deposition of Passivation Layers”, 한국반도체디스플레이기술학회 2025 국내학술대회, 명지대학교, May 30 (2025), Poster

Jaemin Jung, Jaeyoon Shim and In-Hwan Baek, “Electrical Performance Enhancement of p-Type SnO TFTs via Back-Channel Engineering with Fluorocarbon Plasma Treatment”, 한국반도체디스플레이기술학회 2025 국내학술대회, 명지대학교, May 30 (2025), Poster

Dahui Jeon and In-Hwan Baek, "Area-selective Atomic Layer Deposition of Ruthenium Thin Films via Atmospheric Pressure Plasma Technology", 제 32회 반도체학술대회, 강원도 하이원리조트, February 12-14 (2025), Oral

Inhong Hwang, and In-Hwan Baek, "Investigation of Atomic Layer Deposited SnO2 Thin Films for Next-Generation DRAM Electrode Application", 제 32회 한국반도체학술대회, 강원도 하이원리조트, February 12-14 (2025), Oral

Jaemin Jung, and In-Hwan Baek, "Modulation of p-Type SnO TFT Characteristics by Using Atmospheric Ar/O2 Plasma Treatment", 제 32회 한국반도체학술대회, 강원도 하이원리조트, February 12-14 (2025), Poster

Yoohyeon Jung, Inhong Hwang, and In-Hwan Baek, "Stability Improvement of Indium Oxide Thin-Film Transistors via ALD Al2O3 Passivation Layer", 제 32회 한국반도체학술대회, 강원도 하이원리조트, February 12-14 (2025), Poster

Jaeyoon Shim, Minki Choe, Seung Ho Ryu, Jihoon Jeon, Taek-Mo Chung, Seong Keun Kim, and In-Hwan Baek, "Interfacial Engineering of p-type Sno Top-Gated Thin Film Transistors with an Ultra-Thin Al2O3 Interlayer", 제 32회 한국반도체학술대회, 강원도 하이원리조트, February 12-14 (2025), Poster

Jaeyoon Shim, and In-Hwan Baek, "Tailoring the Performance of Tellurium TFTs via Oxidant Variation in ALD Al2O3 Passivation Layer", 제 32회 한국반도체학술대회, 강원도 하이원리조트, February 12-14 (2025), Poster

In-Hwan Baek, "Atomic layer deposition processes for high-performance thin-film CMOS system", NCC 2025, 대전 컨벤션센터, January 16,17 (2025), Oral (Invited)

Dahui Jeon and In-Hwan Baek, "Atmospheric Plasma-assisted Area-selective Atomic Layer Deposition of Ruthenium Thin Films", NCC 2025, 대전 컨벤션센터, January 16,17 (2025), Poster

Inhong Hwang, and In-Hwan Baek, "Investigation of Atomic Layer Deposition of Indium-oxide Using DBADMIn Precursor for Thin Film Transistor Active Layer", NCC 2025, 대전 컨벤션센터, January 16,17 (2025), Poster

Dahui Jeon, Jaemin Jung and In-Hwan Baek, "Area-selective Ruthenium ALD via CFx Plasma Treatment for Advanced Interconnect", 한국화학공학회 국제학술대회, 부산 BEXCO, October 16-18 (2024), Poster

Inhong Hwang, Yoohyeon Jung, and In-Hwan Baek, "Investigation of Atomic Layer Deposited SnO2 Thin Films for Next-Generation DRAM Electrodes", 한국화학공학회 국제학술대회, 부산 BEXCO, October 16-18 (2024), Poster

Minki Choe, Jaeyoon Shim, Inhong Hwang, Seung Ho Ryu, Jihoon Jeon, Take-Mo Chung, Seong Keun Kim and In-Hwan Baek, "The Role of an Al2O3  interlayer for Improving the Electrical Performance of p-type SnO Top-Gate Thin Film Transistors", 한국화학공학회 국제학술대회, 부산 BEXCO, October 16-18 (2024), Poster (발표자: Jaeyoon Shim)

Dahui Jeon, Inhong Hwang and In-Hwan Baek, “Area-selective ALD of Ruthenium Thin Film via CFx Plasma Treatment”, 한국화학공학회 춘계학술대회, ICC 제주국제컨벤션센터, April 24-26 (2024), Poster

Inhong Hwang, Dahui Jeon, and In-Hwan Baek, "Atomic Layer Deposited InXO Thin Film for DRAM Transistor Application", 한국화학공학회 춘계학술대회, ICC 제주 국제컨벤션센터, April 24-26 (2024), Poster

Minki Choe, Seung Ho Ryu, Jihoon Jeon, Inhong Hwang, Dahui Jeon, Taeyong Eom, Take-Mo Chung, Seong Keun Kim and In-Hwan Baek, "Reduction of Hysteresis in Top-Gate SnO Thin Film Transistors using an Al2O3  interlayer", 한국화학공학회 춘계학술대회, ICC 제주 국제컨벤션센터, April 24-26 (2024) Oral

Dahui Jeon†, Inhong Hwang†, and In-Hwan Baek, "Improvement of BEOL compatible Indium-based-oxide TFT for DRAM", 제 31회 한국반도체학술대회, 경주 화백컨벤션센터, January 24-26 (2024), Poster (학부생 포스터 세션)

Minki Choe, Seung Ho Ryu, Taeyong Eom, Take-Mo Chung, Seong Keun Kim, and In-Hwan Baek, "Dielectric Engineering for High-Performance Top Gate SnO Thin-Film Transistors toward Vertically Stacked Complementary Inverters", 제 31회 한국반도체학술대회, 경주 화백컨벤션센터, January 24-26 (2024), Poster

In-Hwan Baek, “Semionducting oxide/sulfide thin films synthesized by ALD process for future electronics”, 2023 전기전자재료학회 하계학술대회, 평창 알펜시아 컨벤션센터, June 22-23 (2023), Oral  (Invited)

In-Hwan Baek, Seong Keun Kim, “Atomic Layer Deposition for Emerging Semiconducting Materials”, 제 30회 한국반도체학술대회, 강원도 정선 하이원리조트, February 13-15 (2023), Oral (Invited)

In-Hwan Baek, “Atomic Layer Deposition for Emerging Semiconducting Materials”, Nano Convergence Conference, 경기도 광주 곤지암 리조트, January 26-27 (2023), Oral  (신진 연구자 발표)

In-Hwan Baek, Ah-Jin Cho, Sangtae Kim, Ga Yeon Lee, Jeong Hwan Han, Taek-Mo Chung, Cheol Seong Hwang, and Seong Keun Kim, “Enlargement of two-dimensional SnS grains at low temperatures via substrate surface modification”, 제 28회 한국반도체학술대회, 온라인 개최, January 25-29 (2021), Oral

 In-Hwan Baek, Jung Joon Pyeon, Ah-Jin Cho, Sung Ok Won, Taek-Mo Chung, Cheol Seong Hwang, and Seong Keun Kim, “Cation-regulated transformation process for uniform p-SnS thin film deposition at low temperatures”, 한국 전기전자재료학회 하계학술대회 2020, 강원도 평창 알펜시아, July 08-10 (2020), Oral

 In-Hwan Baek, Jung Joon Pyeon, Ga-Yeon Lee, Young Geun Song, Han sol Lee, Sung Ok Won, Taek-Mo Chung, Jeong Hwan Han, Chong-Yun Kang, Cheol Seong Hwang, and Seong Keun, “Cation-Regulated Transformation Process for 2-D Tin Monosulfide Thin Film Deposition”, 제 27회 한국반도체학술대회, 강원도 하이원리조트, February 12-14 (2020), Oral

 In-Hwan Baek, Jung Joon Pyeon, Taek-Mo Chung, Jeong Hwan Han, Cheol Seong Hwang and Seong Keun Kim, “Atomic layer deposited quaternary In-Zn-Sn-O thin films for high-performance thin film transistors”, 제 26회 한국반도체학술대회,강원도 웰리힐리파크, February 13-15 (2019), Oral

 In-Hwan Baek, Jung Joon Pyeon, Taek-Mo Chung, Jeong Hwan Han, Cheol Seong Hwang and Seong Keun Kim, “The growth of well-oriented 2-D SnS thin films via atomic layer deposition” Nano Convergence Conference 2019, 강원도 엘리시안 리조트, January 17-18 (2019), Poster

  In-Hwan Beak, Jung Joon Pyeon, Taek Mo Chung, Jeong Hwan Han, Choel Seong Hwang and Seong Keun Kim, “Synthesis of 2D SnS Thin films and their potential applications”, 제 25회 한국반도체학술대회, 강원도 하이원리조트, February 5-7 (2018), Oral

  In-Hwan Baek, Soo Hyun Kim, Jung Jun Pyeon, Taek Mo Chung, Jeong Hwan Han, Cheol Seong Hwang, and Seong Keun Kim, “High performance p-type thin film transistors with atomic layer deposited SnO films”, 제 24회 한국반도체학술대회, 강원도 대명 비발디파크, February 13-15 (2017), Oral