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Principal Investigator
백인환 (In-Hwan Baek)
Assistant professor
Department of Chemical Engineering, Inha University
Program in Semiconductor Convergence
E-mail : baek@inha.ac.kr
Office: 60-1316
100, Inha-ro, Michuhol-gu, Incheon, Republic of Korea (22212)
Phone : +82-32-860-7492
Experience/Education:
B.S. Materials Science and Engineering, Yonsei University (2016)
Ph. D. Materials Science and Engineering, Seoul National University (2021)
Staff Engineer, Flash TD team, Semiconductor Research Center, Samsung Electronics (2021-22)
Awards/Honors
2023.11.09. Convergence Research Fellowship Top Prize Awardee (Minister of Science and ICT Award)
2021.01.26. 28th Korean Semiconductor Conference Top Paper Award (KSIA)
Ph.D Candidate
전다희 (Dahui Jeon)
2023.01.01~
Research area: Metal ALD for advanced DRAM applications, Area-selective ALD
M.S. Candidates
황인홍 (InHong Hwang)
2023.01.01~
2nong@inha.edu
Research area: n-type oxide semiconducting thin films, M3D
송하린 (Harin Song)
2024.03.01~
hrhr@inha.edu
Research area: Plasma-enhaced ALE process for interconnects
심재윤 (Jaeyoon Shim), Leader
2024.01.01~
Research area: Process development for p-type chalcogenides, Stackable CMOS integration
정유현 (Yoohyeon Jung)
2024.01.01~
Research area: Metal ALD, DRAM capacitors
정재민 (Jaemin Jung)
2024.03.01~
Research area: Process development for p-type oxides,
Stackable CMOS integration
양홍주 (Hong Ju Yang)
2025.01.01~
Research area: ICP-RIE/ALE process for next-generation interconnect materials (Mo, Co)
원대한 (Daehan Won)
2025.01.01~
Research area: Atomic layer etching for Cobalt/Molybdenum, ICP-RIE
정호진 (Hojin Chung)
2025.07.01~
Research area: Atomic layer etching for interconnect materials
이준용 (Jun Yong Lee)
2025.01.01~
Research area: Stackable CMOS integration, n-type oxide semiconductors
서상범 (Sang Beom Seo)
2025.03.01~
Research area: Stackable CMOS integration
Undergraduate Researchers
배수빈
2025.07.01~
Research area: Area-selective ALD
백승민
2026.01.01~
Research area: Process development for p-type chalcogenides
양희주
2026.01.01~
Research area: Metal ALD
한재서
2026.01.01~
Research area: ICP-RIE process
손민성
2026.01.01~
Research area: ALE process
Former Undergraduate Researchers
김홍구, 명예진, 윤순현, 권오빈, 오재문, 김광민, 윤다운, 김범준, 김성렬,
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