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RESEARCH INTERESTS
ALD Systems
- Thermal ALD
- Plasma-enhanced ALD (CCP, ICP, HCP)
- Next-generation ALD (Powder ALD, Ultraviolet ALD, Electron-enhanced ALD)Further interests
- Nanophotonics
- MIM infrared absorber
- 2D materials-based nanophotonics
INSTITUTION
University of California, Los Angeles (UCLA)
Mechanical and Aerospace Engineering
LABORATORY HOMEPAGE
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