CONFERENCES
CONFERENCES
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2022
Phase Transition of TiO2 Using Plasma Atomic Layer Annealing
The Korean Society of Mechanical Engineers Annual Meeting 2022, Korea
S. Lee# (oral presenter), D. Go#, K. H. Kim, B. C. Yang, and J. An*
High Capacitance MIM Capacitors with Crystallized TiO2 Films by Plasma-Assisted Atomic Layer Annealing
2022 Materials Research Society (MRS) Spring Meeting & Exhibit, Hawai'i, United States
S. Lee# (oral presenter), D. Go#, K. H. Kim, C. M. Yang, and J. An*
Improvement of Atomic Layer Deposited TiO2 Film Crystallinity by Plasma Atomic Layer Annealing with DC Biasing
The 29th Korean Conference on Semiconductors, Korea
J. W. Shin# (poster presenter), S. Lee, G. Park, and J. An*
2021
Highly Improvement Performance of Ru/TiO2-ZrO2-TiO2/Ru Metal-Insulator-Metal Capacitors by Formation of Rutile-TiO2 with High Crystallinity Using Atomic Layer Annealing
Korea Society for Precision Engineering 2021 Autumn Conference, Korea
S. Lee# (oral presenter), D. Go, K. H. Kim, C. M. Yang, and J. An*
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