LPCVD 

로이스랩 / LPCVD-100

Synthesis of 2D materials

(Graphene, Amorphous Carbon Monolayer, etc)

PEALD

iSAC RESEARCH / IOV-DX1M

Growth of dielectric oxide materials

(Al2O3, HfO2, etc)

PECVD/TCVD

Firbl / PE-TCVDJ21P-HV

Synthesis of 2D materials

(Graphene, h-BN, etc)

RF MAGNETRON MULTI TARGET SPUTTER SYSTEM

Sientec Co., Ltd / 4targe Sputter

Deposition of  oxide thin films (SnO, ITO, ZnO, etc)

THERMAL EVAPORATOR 

VTS / DaOn-1000TE

Deposition of  metal thin films (Al, Ag, Ni, Ti, etc)

THERMAL ALD SYSTEM

CN1 / ATOMIC BASIC

Growth of gate oxide materials (Al2O3 , HfO2, etc)

HIGH TEMPERATURE FURNACE

M.O. TECH / HTF-100

Device Heat Treatment

CLEAN BENCH FOR SAMPLE CLEANING AND PREPARATION

SAMIN SCIENCE / FHNS-V18080

Sonicator, Spin-Coater, UVO Cleaner, Hot Plate

UVO CLEANER

AHTECH LTS/ AC-3

Cleans and modifies surfaces with UV/ Ozone

SONICATOR

KODO TECH / JAC-3010

Disperses particles using ultrasound for cleaning 

SPIN COATER

EF-4op

PR coater for photolithography 

MULTI HOT PLATE STIRRER

WISD LAB. INSTRUMENTS/SMHS-3

Heat treatment

 VACUUM PROBE STATION

MSTECH / M5VC

Electrical Measurement of Devices

(MOSFET, MOSCAP, DLTS, TFT, etc.)

SEMICONDUCTOR PARAMETER ANALYZER

KEITHLEY / 4200A

4SMU and 2PMU equipped

Electrical Measurement of Devices

DLTS TEMPERATURE CONTROLLER

MSTECH / MST1000H

Measure the deep-level defects and traps in Devices

MFIA DLTS IMPEDANCE ANALYZER

ZURICH INSTRUMENT / MFIA 

High Frequency Impedance for DLTS Measurement 

SEMICONDUCTOR PARAMETER ANALYZER

AGILENT TECHNOLOGY / HP4155B

Electrical Measurement of Devices

(MOSFET, MOSCAP, TFT, etc.)

PRECISION LCR METER

KEYSIGHT / E4980A

Fast speed measurement of capacitance

PROBE STATION (AIR)

MSTECH / 5500

Electrical Measurement of Devices (MOSFET, MOSCAP, TFT, etc.)

ARBITRARY FUNCTION GENERATOR

Tektronix / AFG31252

DLTS Measurement

RAMAN SPECTROSCOPY

RENISHAW / inVia Basis

Characterize materials molecular vibrations

ATOMIC FORCE MICROSCOPY

OXFORD INSTRUMENTS / MFP-3D

Characterize topography at nanoscale

OPTICAL MICROSCOPY

ZEISS / AX10

Characterize magnified visible-light surface images