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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions PDF

by : Stephen M. Rossnagel

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Book Description:

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

Book Detail:

Title: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions

Author : Stephen M. Rossnagel

Pages : 546

Publisher : William Andrew

Language :

ISBN : 0815512201