Vacuum Process

ACP Etcher

-Load-Lock/Process chamber

-Two RF power (Source/Bias)

-Rotary/Turbo pump

Thermal Evaporator

-Process chamber

-Rotary/Cryo pump

RF Magnetron Sputter

-Process chamber

-Rotary/Diffusion pump

Non-vacuum Process

Electric Furnace


Spincoater


Ultraviolet Ozone Cleaner


Hot plate


Ultrasonic Cleaner


Measurement/Analysis

Optical Microscopy


Probe Station


4-point probe