Vacuum Process
Vacuum Process
Embedded Files
ACP Etcher
ACP Etcher
-Load-Lock/Process chamber
-Two RF power (Source/Bias)
-Rotary/Turbo pump
Thermal Evaporator
Thermal Evaporator
-Process chamber
-Rotary/Cryo pump
RF Magnetron Sputter
RF Magnetron Sputter
-Process chamber
-Rotary/Diffusion pump
Non-vacuum Process
Non-vacuum Process
Electric Furnace
Electric Furnace
Spincoater
Spincoater
Ultraviolet Ozone Cleaner
Ultraviolet Ozone Cleaner
Hot plate
Hot plate
Ultrasonic Cleaner
Ultrasonic Cleaner
Measurement/Analysis
Measurement/Analysis
Optical Microscopy
Optical Microscopy
Probe Station
Probe Station
4-point probe
4-point probe
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