現有設備

The advantages of the Keysight 5517B Laser Head:

• Precision Dual-Frequency Measurement: Provides a stabilized two-frequency helium-neon laser source for precision interferometric displacement measurement.

• High Wavelength Stability: Uses a nominal vacuum wavelength of 632.99137 nm with high short-term and lifetime stability.

• Stable Reference Signal: Offers a reference frequency range of 1.9–2.4 MHz.

• Standard Optical Output: Provides a standard 6 mm laser beam suitable for common interferometer optics.

• High Reliability: The 5517 series has a typical mean time between failures of more than 50,000 hours.

• Machine-Tool Applications: Suitable for precision position and motion measurement in machine tools and relatively low-speed positioning systems.

The advantages of the PI P-562.3CD PIMars Nanopositioning Stage:

• Three-Axis Nanopositioning: Provides precise positioning and scanning in the X, Y, and Z directions.

• 200 µm XYZ Travel Range: Offers 200 µm of closed-loop travel in each axis.

• Nanometer-Level Resolution: Achieves a system resolution of approximately 1 nm.

• Capacitive Position Feedback: Ensures high linearity, stability, and precise closed-loop positioning.

• Frictionless Flexure Guidance: Eliminates mechanical play, friction, and wear.

• Fast Dynamic Response: Provides step-and-settle performance of less than 10 ms under unloaded conditions.

• Large Clear Aperture: Features a 66 × 66 mm central opening for optical and transmitted-light applications.

• Precision Measurement Applications: Suitable for interferometry, scanning microscopy, semiconductor positioning, and precision metrology.

The advantages of the PI P-562.6CD PIMars Nanopositioning Stage:

• Six Degrees of Freedom: Provides precise linear movement in X, Y, and Z, together with rotational adjustment about all three axes.

• Nanometer-Level Positioning: Achieves a typical system resolution of 1 nm in all three linear axes.

• Precise Angular Adjustment: Provides ±0.5 mrad rotational motion with a typical resolution of 0.1 µrad.

• Capacitive Position Feedback: Enables high linearity, long-term stability, and accurate closed-loop positioning.

• Parallel-Kinematic Design: Improves multi-axis accuracy and dynamic response while allowing active compensation of axis crosstalk.

• Frictionless Flexure Guidance: Eliminates mechanical play, friction, wear, and the need for lubrication.

• Large Clear Aperture: Features a 66 × 66 mm central opening for optical and transmitted-light applications.

• Precision Measurement Applications: Suitable for interferometry, metrology, scanning microscopy, semiconductor positioning, and nanoscale alignment.

The advantages of the KEYENCE CL-3000 Series:

• High-Precision Non-Contact Measurement: Accurately measures height, displacement, and thickness without contacting the target.

• Stable Measurement on Various Materials: Suitable for metals, glass, transparent films, dark surfaces, and curved targets.

• Compact Sensor Head Design: Enables installation in confined spaces and precision measurement systems.

• Transparent-Material Measurement: Supports thickness, multilayer, and gap measurement with refractive-index correction.

• Reduced Thermal Influence: The sensor head contains no electronic components, minimizing heat and electrical interference.

• Flexible Data Acquisition: Supports trend monitoring, statistical analysis, CSV export, USB, and Ethernet communication.

The advantages of the KEYENCE LJ-X8020 Sensor Head:

• Ultra-High-Resolution Profiles: Acquires up to 3,200 data points per profile.

• Micrometer-Level Repeatability: Provides 0.3 µm repeatability in both X and Z axes under specified conditions.

• Simultaneous X–Z Measurement: Captures width and height information across an entire laser line.

• Single-Shot HDR: Measures targets ranging from dark surfaces to highly reflective materials.

• Detailed 2D/3D Inspection: Supports profile, dimension, height, step, flatness, and surface-defect measurement.

• Industrial-Grade Design: Features an IP67-rated aluminum housing for automated inspection environments.