Equipment
Embedded Files
Keysight B1500A / B1505A
Semiconductor Device Parameter Aalyzer
2 sets
ID-VG
ID-VD
Funtional cards -1
Funtional cards -2
B1531A Remote-sense & Switch Unit
Agilent E4980A
Low Leakage Switch Mainframe
C-V
Radiant
Precision Premier II
Precision LC II
P-V
Black box testing & Heating system
6 inches Black Box
8 inches Black Box
Heater
Water cooling system
Low temperature measurement system
I-V、C-V、DLTS、AS and Defect extraction
Features
High stability operation from 4.3 K to 475 K (optional extension: 3.2 K low temperature, 675 K high temperature)
Active cryogenic control of the cold head and radiation shield
Measurements from DC to 67 GHz
Accommodates up to 51 mm (2 in) diameter wafers
Configurable with up to six micro-manipulated probe arms
Probe arms with 3-axis adjustments and ±5° theta planarization
Sample stage with ±5° in-plane rotation
Cables, shields, and guards minimize electrical noise and thermal radiation losses
High resolution optical system
Options and accessories for customization to specific research needs
Model 336 Temperature Controller
Annealing System
Annealing System
Cooler
Amplifier
SR560
SR570
SourceMeter
2400 SourceMeter
2410 1100V Source Meter
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