Equipment

LOW TEMPERATURE MEASUREMENT EQUIPMENT

• Dry Dilution Refrigerator (BLUEFORS LD400 x 2, LD 250 x 1 w/ 12 T magnets, ~ 10 mK)

• Dry Helium 3 Refrigerator (Niki Glass, ~ 300 mK)

• GM Refrigerator (~ 4 K), 6 sets

• Wet Cryogenic Current Comparator (~ 4 K)

• Wet Dilution Refrigerator (~20 mK)

• Wet Helium 4 Dewers (~ 4 K)

We mostly use dry fridges, except the cryogenic current comparator, which still needs liquid helium 4. We AIST stoped operation of the helium liquefier (LINDE L140) system. 

FABRICATING/MEASUREMENT EQUIPMENT

• Electron Beam Lithography System (50 kV, Elionix ELS 7500a)

Old electronics and mechanism have been refurbished in 2022

• Evaporators (Electron Beam, Resistive Thermal)

• Microscopes (Laser, Optical)

• Hume Hood

• Auto (300 mm Wafer) Prober (Cascade Elite 300 w/ Semiconductor Parameter Analyzer)

• Manual Probers

• Wedge Wire Bonders

• Flip Chip Bonder (InSb solder)

• Machining Devices

• Direct Current Comparator Resistance Bridges

• High Resistance Bridge

• Air Baths, Oil Baths, Temperature/Humidity Stabilized Chambers

• Pulse Pattern Generators

• Arbitrary Waveform Generators

• Signal Generators  (e.g., Keysight VXG M9384B 20 GHz)

• Calibrators (e.g., Fluke 5730A)

• Vector Network Analyzers

• Sampling Oscilloscopes

• D/A Converters

• A/D Converters

We also have access to NPF, Qufab, COLOMODE, and other AIST cleanroom facilities.

Standards

• Quantized Hall Resistance Standard (Japan's National Resistance Standard)

• Josephson Voltage Standard (Japan's National Voltage Standard)

• Standard Resistors

• Zener Diode Voltage Standards

The voltage and resistance calibration services of the NMIJ, AIST are assessed/peer-reviewed based on the ISO17025 and CIPM MRA, which designed to help domestic and international manufacturers and users of precision electronic instruments.  The services are offered to public organizations/institutions and private sectors/organizations alike. We achieve the highest possible levels of voltage and resistance measurement quality in Japan and, in most cases, top levels in the world. We also offer consultations to cover measurements at intermediate voltage and resistance values, and/or measurements with special conditions of temperatures, humidities, pressures, currents, and voltages.

LOW TEMPERATURE CHIPS

• Quantized Hall Resistance Standard Devices

• Quantum Hall Array Resistance Standard Devices (10 kΩ, 1 MΩ, 10 MΩ)

• Quantum Hall Resistance Divider (32 QHR bars in series with binary taps)

• Programmable Josephson Voltage Standard Devices (≤ 4 mV, ≤ 2 V, ≤ 10 V)

• Pulse-driven Josephson Voltage Standard Devices (Josephson Arbitrary Waveform Synthesizer, JAWS)

• SINIS Single Electron Turnstiles

• Tunable Barrier Single Electron Pumps (GaAs/GaAlAs)

• Silicon Single Electron Pumps (collaboration with NTT BRL)

• Quantum anomalous Hall effect Devices (collaboration with RIKEN)

• Flying Qubit/Quantum Electron Optics devices (collaboration with RIKEN and Néel)

• Leviton Devices  (collaboration with RIKEN and Néel)

These devices have been manufactured mostly by ourselves with our own facilities and AIST cleanrooms including NPF, Qufab, and COLOMODE.